Inventor · disambiguated record
Soovo Sen
Also filed as: SEN SOOVO
5 granted patents·11 pending applications·323 citations·filing 2002–2017
83Inventor score
Top patents by PatentIndex Score
16 records- 0196US6946033B2Heated gas distribution plate for a processing chamberAPPLIED MATERIALS INC·Filed 2002·Granted Sep 20, 2005·227 cites·17 claims
- 0290US7024105B2Substrate heater assemblyAPPLIED MATERIALS INC·Filed 2003·Granted Apr 4, 2006·56 cites·23 claims
- 0385US7008484B2Method and apparatus for deposition of low dielectric constant materialsAPPLIED MATERIALS INC·Filed 2002·Granted Mar 7, 2006·19 cites·15 claims
- 0475US7628863B2Heated gas box for PECVD applicationsAPPLIED MATERIALS INC·Filed 2004·Granted Dec 8, 2009·20 cites·10 claims
- 0564US8983028B2Density profile measurement by detecting backscattered radiation with position-sensitive detectorKULIK ALEX·Filed 2011·Granted Mar 17, 2015·1 cites·18 claims
- 0660US2008152838A1Hardware development to reduce bevel depositionAPPLIED MATERIALS INC·Filed 2007·Application pending·0 cites
- 0759US2017121813A1Method and apparatus for cleaning a cvd chamberAPPLIED MATERIALS INC·Filed 2017·Application pending·0 cites
- 0858US2014158048A1Method and apparatus for cleaning a cvd chamberAPPLIED MATERIALS INC·Filed 2014·Application pending·0 cites
- 0954US2005196971A1Hardware development to reduce bevel depositionAPPLIED MATERIALS INC·Filed 2005·Application pending·0 cites
- 1053US2006144334A1Method and apparatus for deposition of low dielectric constant materialsAPPLIED MATERIALS INC·Filed 2006·Application pending·0 cites
- 1147US2006162661A1Mixing energized and non-energized gases for silicon nitride depositionAPPLIED MATERIALS INC·Filed 2005·Application pending·0 cites
- 1247US2012009803A1Mixing Energized and Non-Energized Gases for Silicon Nitride DepositionJUNG KEE BUM·Filed 2011·Application pending·0 cites
- 1341US2005150452A1Process kit design for deposition chamberFiled 2004·Application pending·0 cites
- 1441US2004052969A1Methods for operating a chemical vapor deposition chamber using a heated gas distribution plateAPPLIED MATERIALS INC·Filed 2002·Application pending·0 cites
- 1538US2004118519A1Blocker plate bypass design to improve clean rate at the edge of the chamberAPPLIED MATERIALS INC·Filed 2002·Application pending·0 cites
- 1634US2013253872A1Flow meter calibration systemCURTIS ANTHONY·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →