Inventor · disambiguated record
Yulu Chen
Also filed as: CHEN YULU
7 granted patents·2 pending applications·62 citations·filing 2016–2018
80Inventor score
Files withGLOBALFOUNDRIES INC9
Top patents by PatentIndex Score
9 records- 0195US9478462B1SAV using selective SAQP/SADPGLOBALFOUNDRIES INC·Filed 2016·Granted Oct 25, 2016·31 cites·20 claims
- 0294US9484258B1Method for producing self-aligned viasGLOBALFOUNDRIES INC·Filed 2016·Granted Nov 1, 2016·21 cites·20 claims
- 0393US9911604B1Sidewall spacer pattern formation methodGLOBALFOUNDRIES INC·Filed 2017·Granted Mar 6, 2018·10 cites·20 claims
- 0446US10332745B2Dummy assist features for pattern supportGLOBALFOUNDRIES INC·Filed 2017·Granted Jun 25, 2019·0 cites·17 claims
- 0544US10802393B2Extreme ultraviolet (EUV) lithography maskGLOBALFOUNDRIES INC·Filed 2017·Granted Oct 13, 2020·0 cites·19 claims
- 0644US10564554B2System and method for analyzing printed masks for lithography based on representative contoursGLOBALFOUNDRIES INC·Filed 2018·Granted Feb 18, 2020·0 cites·20 claims
- 0739US10468149B2Extreme ultraviolet mirrors and masks with improved reflectivityGLOBALFOUNDRIES INC·Filed 2017·Granted Nov 5, 2019·0 cites·8 claims
- 0836US2019056651A1Euv patterning using photomask substrate topographyGLOBALFOUNDRIES INC·Filed 2017·Application pending·0 cites
- 0930US2019258157A1Photolithography system and method incorporating a photomask-pellicle apparatus with an angled pellicleGLOBALFOUNDRIES INC·Filed 2018·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Yulu Chen files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →