Inventor · disambiguated record
Nobuhiro Iwama
Also filed as: IWAMA NOBUHIRO
3 granted patents·4 pending applications·30 citations·filing 2002–2007
68Inventor score
Top patents by PatentIndex Score
7 records- 0189US8251011B2Plasma processing apparatusYAMAZAWA YOHEI·Filed 2007·Granted Aug 28, 2012·13 cites·19 claims
- 0280US7527016B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2003·Granted May 5, 2009·16 cites·11 claims
- 0348US2007113787A1Plasma process apparatusTOKYO ELECTRON LTD·Filed 2007·Application pending·0 cites
- 0444US7709397B2Method and system for etching a high-k dielectric materialTOKYO ELECTRON LTD·Filed 2004·Granted May 4, 2010·1 cites·12 claims
- 0542US2006027169A1Method and system for substrate temperature profile controlTOKYO ELECTRON LTD·Filed 2004·Application pending·0 cites
- 0638US2004255863A1Plasma process apparatusFiled 2002·Application pending·0 cites
- 0737US2006037702A1Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →