Inventor · disambiguated record
Kelvin Zin
Also filed as: ZIN KELVIN · ZIN KELVIN KYAW
5 granted patents·1 pending application·39 citations·filing 2007–2010
77Inventor score
Technology areasH10P
Top patents by PatentIndex Score
6 records- 0187US7637269B1Low damage method for ashing a substrate using CO2/CO-based processTOKYO ELECTRON LTD·Filed 2009·Granted Dec 29, 2009·17 cites·19 claims
- 0282US8252192B2Method of pattern etching a dielectric film while removing a mask layerLEE YAO-SHENG·Filed 2009·Granted Aug 28, 2012·9 cites·20 claims
- 0379US8435901B2Method of selectively etching an insulation stack for a metal interconnectZIN KELVIN·Filed 2010·Granted May 7, 2013·9 cites·19 claims
- 0463US8809196B2Method of etching a thin film using pressure modulationZIN KELVIN KYAW·Filed 2009·Granted Aug 19, 2014·4 cites·15 claims
- 0545US7622390B2Method for treating a dielectric film to reduce damageTOKYO ELECTRON LTD·Filed 2007·Granted Nov 24, 2009·0 cites·20 claims
- 0644US2009246713A1Oxygen-containing plasma flash process for reduced micro-loading effect and cd biasTOKYO ELECTRON LTD·Filed 2008·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →