Assignee
LEE YAO-SHENG
US·3 granted patents·139 citations·filing 2009–2012
Top patents by PatentIndex Score
3 records- 0198US8614126B1Method of making a three-dimensional memory array with etch stopLEE YAO-SHENG·Filed 2012·Granted Dec 24, 2013·95 cites·14 claims
- 0295US8828884B2Multi-level contact to a 3D memory array and method of makingLEE YAO-SHENG·Filed 2012·Granted Sep 9, 2014·35 cites·14 claims
- 0382US8252192B2Method of pattern etching a dielectric film while removing a mask layerLEE YAO-SHENG·Filed 2009·Granted Aug 28, 2012·9 cites·20 claims
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