Inventor · disambiguated record
Fumiko Yagi
Also filed as: YAGI FUMIKO
4 granted patents·4 pending applications·91 citations·filing 2006–2011
79Inventor score
Top patents by PatentIndex Score
8 records- 0193US7535688B2Method for electrically discharging substrate, substrate processing apparatus and programTOKYO ELECTRON LTD·Filed 2006·Granted May 19, 2009·49 cites·27 claims
- 0290US7896967B2Gas supply system, substrate processing apparatus and gas supply methodTOKYO ELECTRON LTD·Filed 2007·Granted Mar 1, 2011·22 cites·5 claims
- 0384US8790529B2Gas supply system, substrate processing apparatus and gas supply methodHAYASAKA SHINICHIRO·Filed 2011·Granted Jul 29, 2014·11 cites·3 claims
- 0476US8190281B2Substrate processing apparatus, method for examining substrate processing conditions, and storage mediumYOKOUCHI TAKESHI·Filed 2007·Granted May 29, 2012·9 cites·13 claims
- 0558US2007227658A1Control device for controlling substrate processing apparatus and method thereforTOKYO ELECTRON LTD·Filed 2007·Application pending·0 cites
- 0656US2011190924A1Control device for controlling substrate processing apparatus and method thereforTOKYO ELECTRON LTD·Filed 2010·Application pending·0 cites
- 0748US2007199655A1Substrate processing apparatus, method for modifying substrate processing conditions and storage mediumTOKYO ELECTRON LTD·Filed 2007·Application pending·0 cites
- 0845US2011224818A1Substrate processing apparatus, method for modifying substrate processing conditions and storage mediumTOKYO ELECTRON LTD·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →