Assignee

HAYASAKA SHINICHIRO

JP·1 granted patent·11 citations·filing 2011–2011

Technology mixC23C1 F17D1 H01J1 H10P1 Y10T1

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1 record

0184US8790529B2Gas supply system, substrate processing apparatus and gas supply methodHAYASAKA SHINICHIRO·Filed 2011·Granted Jul 29, 2014·11 cites·3 claims

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