Inventor · disambiguated record
Kenichi Akazawa
Also filed as: AKAZAWA KENICHI
12 granted patents·2 pending applications·18 citations·filing 2015–2025
85Inventor score
Files withEBARA CORP14
Top patents by PatentIndex Score
14 records- 0186US10525564B2Reversing machine and substrate polishing apparatusEBARA CORP·Filed 2016·Granted Jan 7, 2020·3 cites·15 claims
- 0284US11511389B2Polishing head and polishing apparatusEBARA CORP·Filed 2019·Granted Nov 29, 2022·3 cites·11 claims
- 0381US2025289088A1Break-in processing apparatus and break-in processing methodEBARA CORP·Filed 2025·Application pending·0 cites
- 0479US12337438B2Break-in processing apparatus and break-in processing methodEBARA CORP·Filed 2022·Granted Jun 24, 2025·0 cites·10 claims
- 0579USD981459SRetaining ring for substrateEBARA CORP·Filed 2021·Granted Mar 21, 2023·7 cites·1 claims
- 0673USD989012SElastic membraneEBARA CORP·Filed 2021·Granted Jun 13, 2023·4 cites·1 claims
- 0767US10593570B2Substrate holding module, substrate processing apparatus, and substrate processing methodEBARA CORP·Filed 2017·Granted Mar 17, 2020·1 cites·14 claims
- 0852US10141211B2Substrate processing apparatus and substrate transfer methodEBARA CORP·Filed 2017·Granted Nov 27, 2018·0 cites·11 claims
- 0949US9786532B2Substrate processing apparatus and method of transferring a substrateEBARA CORP·Filed 2015·Granted Oct 10, 2017·0 cites·12 claims
- 1046US12237194B2Substrate transporter and substrate processing apparatus including substrate transporterEBARA CORP·Filed 2019·Granted Feb 25, 2025·0 cites·29 claims
- 1145USD1021832SElastic membraneEBARA CORP·Filed 2023·Granted Apr 9, 2024·0 cites·1 claims
- 1240US10160013B2Rinsing bath and substrate cleaning method using such rinsing bathEBARA CORP·Filed 2015·Granted Dec 25, 2018·0 cites·8 claims
- 1333US2015270147A1Substrate processing apparatus and resist removing unitEBARA CORP·Filed 2015·Application pending·0 cites
- 1430USD981969SElastic membrane for semiconductor wafer polishing apparatusEBARA CORP·Filed 2021·Granted Mar 28, 2023·0 cites·1 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →