Break-in processing apparatus and break-in processing method

Abstract

A break-in processing apparatus is disclosed, which can reliably perform a break-in process for an elastic membrane without reducing a utilization rate of a polishing apparatus. The break-in processing apparatus includes a stage to which an elastic membrane assembly including a carrier and an elastic membrane attached to the carrier is placed; a break-in determination module facing the elastic membrane placed to the stage; a fluid supply unit configured to supply a pressurized fluid into a pressure chamber formed between the outermost periphery portion of the elastic membrane and the carrier; and a controller configured to control operations of the break-in determination module and the fluid supply unit. The controller determines a completion of a break-in process of the elastic membrane based on a load applied to the break-in determination module by the elastic membrane which is expanded by the pressurized fluid supplied into the pressure chamber.

What is claimed is: 
     
         1 . A break-in processing apparatus comprising:
 a stage to which an elastic membrane assembly including at least a carrier and an elastic membrane attached to the carrier is placed;   a break-in determination module facing an outermost periphery portion of the elastic membrane of the elastic membrane assembly placed to the stage;   a fluid supply unit configured to supply a pressurized fluid having a predetermined pressure into a pressure chamber formed between the outermost periphery portion of the elastic membrane and the carrier; and   a controller configured to control operations of the break-in determination module and the fluid supply unit,   wherein the controller is configured to determine a completion of a break-in process of the elastic membrane based on a load applied to the break-in determination module by the elastic membrane which is expanded by the pressurized fluid supplied into the pressure chamber, and   wherein the break-in determination module includes at least one pressure-sensitive sensor configured to measure a distribution of the load applied from the elastic membrane in the radial direction of the elastic membrane.   
     
     
         2 . The break-in processing apparatus according to  claim 1 , wherein the at least one pressure-sensitive sensor is a tactile sensor or a tactile pressure sensor. 
     
     
         3 . The break-in processing apparatus according to  claim 1 , wherein the at least one pressure-sensitive sensor includes a plurality of pressure-sensitive sensors arranged along a circumferential direction of the elastic membrane. 
     
     
         4 . The break-in processing apparatus according to  claim 1 , wherein the at least one pressure-sensitive sensor has the same shape as that of the outermost periphery portion of the elastic membrane in a horizontal direction. 
     
     
         5 . The break-in processing apparatus according to  claim 1 , wherein the break-in determination module further includes a shape measuring device which can measure a shape of a lower surface of the outermost periphery portion of the elastic membrane opened to atmosphere, and
 the controller confirms the completion of the break-in process of the elastic membrane based not only on the load applied to the break-in determination module, but also on the shape of the lower surface of the outermost periphery portion of the elastic membrane measured by the shape measuring device.   
     
     
         6 . The break-in processing apparatus according to  claim 5 , wherein the shape measuring device is a two-dimensional displacement sensor that emits a laser beam to the lower surface of the outermost periphery portion of the elastic membrane to thereby obtain the shape of the lower surface of the outermost periphery portion of the elastic membrane. 
     
     
         7 . The break-in processing apparatus according to  claim 1 , wherein the fluid supply unit includes:
 a fluid supply line communicating with a pressure chamber formed between the elastic membrane and the carrier; and   a flow meter and/or a pressure gauge disposed in the fluid supply line, and   
       wherein the controller
 supplies the pressurized fluid having a predetermined pressure into the pressure chamber; 
 measures a flow rate and/or a pressure of the pressurized fluid; and 
 determines whether or not to generate a leak-detection signal based on measurement values of the flow rate and/or the pressure of the pressurized fluid. 
 
     
     
         8 . The break-in processing apparatus according to  claim 7 , wherein the controller
 measures, during supplying of the pressurized fluid into the pressure chamber, the flow rate of the pressurized fluid while regulating the pressure of the pressurized fluid in the pressure chamber by use of a pressure regulator;   measures the pressure of the pressurized fluid in the pressure chamber;   determines whether or not measurement value of the flow rate of the pressurized fluid, which has been measured when variation of the pressure of the pressurized fluid is within an allowable range, is within a reference range; and   generates the leak-detection signal when the flow rate is outside of the reference range.   
     
     
         9 . A break-in processing method for an elastic membrane attached to a carrier, comprising:
 placing an elastic membrane assembly including at least the carrier and the elastic membrane;   supplying a pressurized fluid having a predetermined pressure into a pressure chamber formed between an outermost periphery portion of the elastic membrane and the carrier; and   determining a completion of a break-in process of the elastic membrane based on a load applied to a break-in determination module which faces the outermost periphery portion of the elastic membrane of the elastic membrane assembly placed to a stage to which the elastic membrane assembly is placed,   wherein determining the completion of the break-in process of the elastic membrane is determined based on a measurement result of an at least one pressure-sensitive sensor which measures a distribution of the load applied from the elastic membrane in the radial direction of the elastic membrane.   
     
     
         10 . The break-in processing method according to  claim 9 , further comprising calculating a correction coefficient and/or a correction formula for correcting a polishing load of a polishing recipe that is stored in advance in a controller of a polishing apparatus, such that a load distribution obtained by the pressure-sensitive sensor comes close to a reference distribution. 
     
     
         11 . The break-in processing method according to  claim 9 , further comprising comparing the measurement result of the at least one pressure-sensitive sensor with an allowable range which is set in advance with respect to a reference value and determining whether the measurement result is within the allowable range. 
     
     
         12 . The break-in processing method according to  claim 9 , further comprising:
 opening the pressure chamber to atmosphere;   measuring a shape of a lower surface of the outermost periphery portion of the elastic membrane; and   confirming the completion of the break-in process of the elastic membrane based on the shape of the lower surface of the outermost periphery portion of the elastic membrane.   
     
     
         13 . The break-in processing method according to  claim 12 , wherein measuring the shape of the lower surface of the outermost periphery portion of the elastic membrane is performed by use of a two-dimensional displacement sensor which emits a laser beam to the lower surface of the outermost periphery portion of the elastic membrane to thereby obtain the shape of the lower surface of the outermost periphery portion of the elastic membrane. 
     
     
         14 . The break-in processing method according to  claim 9 , further comprising:
 performing a leak checking of the elastic membrane before the break-in process,   wherein the leak checking includes:
 supplying a pressurized fluid into a pressure chamber formed between the elastic membrane and the carrier in a state where the elastic membrane is placed in close contact with the stage; 
 measuring a flow rate and/or a pressure of the pressurized fluid; and 
 determining whether or not to generate a leak-detection signal based on the flow rate and/or the pressure of the pressurized fluid. 
   
     
     
         15 . The break-in processing method according to  claim 14 , wherein the leak checking includes:
 measuring, during supplying of the pressurized fluid into the pressure chamber, the flow rate of the pressurized fluid while regulating the pressure of the pressurized fluid in the pressure chamber by use of a pressure regulator;   measuring the pressure of the pressurized fluid in the pressure chamber;   determining whether or not measurement value of the flow rate of the pressurized fluid, which has been measured when variation of the pressure of the pressurized fluid is within an allowable range, is within a reference range; and   generating the leak-detection signal when the flow rate is outside of the reference range.