Inventor · disambiguated record
Ruben Haverkort
Also filed as: HAVERKORT RUBEN
3 granted patents·127 citations·filing 2005–2020
70Inventor score
Top patents by PatentIndex Score
3 records- 0195US7294582B2Low temperature silicon compound depositionASM INT·Filed 2005·Granted Nov 13, 2007·116 cites·44 claims
- 0283US7629270B2Remote plasma activated nitridationASM INC·Filed 2005·Granted Dec 8, 2009·11 cites·51 claims
- 0347US12363818B2EUV radiation system including maximizing droplet velocity change transverse to main pulse propagationASML NETHERLANDS BV·Filed 2020·Granted Jul 15, 2025·0 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →