Inventor · disambiguated record
Keith A. Miller
Also filed as: MILLER KEITH · MILLER KEITH A · MILLER KEITH ALAN
103 granted patents·41 pending applications·1,899 citations·filing 1977–2025
99Inventor score
Files withAPPLIED MATERIALS INC91PREFORMED LINE PRODUCTS CO10MILLER KEITH A7MILLER UK LTD4AIR PROD & CHEM3
Top patents by PatentIndex Score
144 records- 0197US11915918B2Cleaning of sin with CCP plasma or RPS cleanAPPLIED MATERIALS INC·Filed 2021·Granted Feb 27, 2024·4 cites·8 claims
- 0297USD934315SDeposition ring for a substrate processing chamberAPPLIED MATERIALS INC·Filed 2020·Granted Oct 26, 2021·35 cites·1 claims
- 0397USD797067STarget profile for a physical vapor deposition chamber targetAPPLIED MATERIALS INC·Filed 2015·Granted Sep 12, 2017·355 cites·1 claims
- 0496US7038137B2Fiber closure systemPREFORMED LINE PRODUCTS CO·Filed 2004·Granted May 2, 2006·102 cites·22 claims
- 0595US11810770B2Methods and apparatus for controlling ion fraction in physical vapor deposition processesAPPLIED MATERIALS INC·Filed 2021·Granted Nov 7, 2023·2 cites·20 claims
- 0695US8907222B2Adjustable cover for conductors and insulatorsPREFORMED LINE PRODUCTS CO·Filed 2013·Granted Dec 9, 2014·226 cites·20 claims
- 0795US4457329ASafety pressure regulatorAIR PROD & CHEM·Filed 1981·Granted Jul 3, 1984·169 cites·3 claims
- 0894US8696878B2Wafer processing deposition shielding componentsRIKER MARTIN LEE·Filed 2012·Granted Apr 15, 2014·19 cites·6 claims
- 0994US8559159B2Electrostatic chuck and methods of use thereofROY SHAMBHU N·Filed 2011·Granted Oct 15, 2013·21 cites·20 claims
- 1094US7239789B2Optical fiber splice casePREFORMED LINE PRODUCTS CO·Filed 2005·Granted Jul 3, 2007·107 cites·22 claims
- 1194US7130519B2Convertible fiber closure platformPREFORMED LINE PRODUCTS CO·Filed 2005·Granted Oct 31, 2006·34 cites·20 claims
- 1294US6143140AMethod and apparatus to improve the side wall and bottom coverage in IMP process by using magnetic fieldAPPLIED MATERIALS INC·Filed 1999·Granted Nov 7, 2000·99 cites·28 claims
- 1393US12014906B2High temperature detachable very high frequency (VHF) electrostatic chuck (ESC) for PVD chamberAPPLIED MATERIALS INC·Filed 2021·Granted Jun 18, 2024·2 cites·20 claims
- 1493USD941372SProcess shield for a substrate processing chamberAPPLIED MATERIALS INC·Filed 2020·Granted Jan 18, 2022·19 cites·1 claims
- 1593US9689070B2Deposition ring and electrostatic chuck for physical vapor deposition chamberAPPLIED MATERIALS INC·Filed 2016·Granted Jun 27, 2017·6 cites·13 claims
- 1693US7520969B2Notched deposition ringAPPLIED MATERIALS INC·Filed 2006·Granted Apr 21, 2009·24 cites·23 claims
- 1793US7418186B1Fiber retention sleevePREFORMED LINE PRODUCTS CO·Filed 2007·Granted Aug 26, 2008·53 cites·30 claims
- 1893US7041200B2Reducing particle generation during sputter depositionAPPLIED MATERIALS INC·Filed 2002·Granted May 9, 2006·45 cites·28 claims
- 1992US10998172B2Substrate processing chamber having improved process volume sealingAPPLIED MATERIALS INC·Filed 2018·Granted May 4, 2021·4 cites·17 claims
- 2091US12176190B2Arc management algorithm of RF generator and match box for CCP plasma chambersAPPLIED MATERIALS INC·Filed 2023·Granted Dec 24, 2024·1 cites·14 claims
- 2191US11670493B2Isolator ring clamp and physical vapor deposition chamber incorporating sameAPPLIED MATERIALS INC·Filed 2020·Granted Jun 6, 2023·2 cites·20 claims
- 2291USD941371SProcess shield for a substrate processing chamberAPPLIED MATERIALS INC·Filed 2020·Granted Jan 18, 2022·17 cites·1 claims
- 2391USD825504STarget profile for a physical vapor deposition chamber targetAPPLIED MATERIALS INC·Filed 2017·Granted Aug 14, 2018·34 cites·1 claims
- 2491US7569125B2Shields usable with an inductively coupled plasma reactorAPPLIED MATERIALS INC·Filed 2005·Granted Aug 4, 2009·16 cites·17 claims
- 2590US8911601B2Deposition ring and electrostatic chuck for physical vapor deposition chamberRASHEED MUHAMMAD·Filed 2011·Granted Dec 16, 2014·8 cites·10 claims
- 2690US7736473B2Magnetron having continuously variable radial positionAPPLIED MATERIALS INC·Filed 2005·Granted Jun 15, 2010·11 cites·8 claims
- 2790US6856747B2Fiber optic cable closure and assemblyPREFORMED LINE PRODUCTS CO·Filed 2002·Granted Feb 15, 2005·46 cites·63 claims
- 2889US11898236B2Methods and apparatus for processing a substrateAPPLIED MATERIALS INC·Filed 2021·Granted Feb 13, 2024·1 cites·17 claims
- 2989US8021527B2Coaxial shafts for radial positioning of rotating magnetronAPPLIED MATERIALS INC·Filed 2007·Granted Sep 20, 2011·11 cites·25 claims
- 3088US9476122B2Wafer processing deposition shielding componentsAPPLIED MATERIALS INC·Filed 2014·Granted Oct 25, 2016·6 cites·9 claims
- 3188US7018515B2Selectable dual position magnetronAPPLIED MATERIALS INC·Filed 2004·Granted Mar 28, 2006·21 cites·40 claims
- 3288US5949551AImage handling method using different image resolutionsEASTMAN KODAK CO·Filed 1997·Granted Sep 7, 1999·117 cites·22 claims
- 3387US11037768B2Methods and apparatus for controlling ion fraction in physical vapor deposition processesAPPLIED MATERIALS INC·Filed 2017·Granted Jun 15, 2021·4 cites·8 claims
- 3487US9177763B2Method and apparatus for measuring pressure in a physical vapor deposition chamberAPPLIED MATERIALS INC·Filed 2013·Granted Nov 3, 2015·9 cites·20 claims
- 3587US7041201B2Sidewall magnet improving uniformity of inductively coupled plasma and shields used therewithAPPLIED MATERIALS INC·Filed 2003·Granted May 9, 2006·31 cites·18 claims
- 3686US7263265B2Convertible fiber closure platformPREFORMED LINE PRODUCTS CO·Filed 2006·Granted Aug 28, 2007·13 cites·18 claims
- 3785US10312065B2Physical vapor deposition (PVD) plasma energy control per dynamic magnetron controlAPPLIED MATERIALS INC·Filed 2016·Granted Jun 4, 2019·4 cites·20 claims
- 3885US9984911B2Electrostatic chuck design for high temperature RF applicationsAPPLIED MATERIALS INC·Filed 2015·Granted May 29, 2018·4 cites·20 claims
- 3984US9957601B2Apparatus for gas injection in a physical vapor deposition chamberAPPLIED MATERIALS INC·Filed 2013·Granted May 1, 2018·3 cites·11 claims
- 4084US8920613B2Offset magnet compensation for non-uniform plasmaBOITNOTT CHRISTOPHER·Filed 2007·Granted Dec 30, 2014·10 cites·16 claims
- 4184US8685215B2Mechanism for continuously varying radial position of a magnetronMILLER KEITH A·Filed 2010·Granted Apr 1, 2014·5 cites·12 claims
- 4284US8500963B2Sputtering of thermally resistive materials including metal chalcogenidesYE MENGQI·Filed 2007·Granted Aug 6, 2013·7 cites·17 claims
- 4383US9062379B2Wafer processing deposition shielding componentsRIKER MARTIN LEE·Filed 2012·Granted Jun 23, 2015·6 cites·19 claims
- 4483US7846310B2Encapsulated and water cooled electromagnet arrayAPPLIED MATERIALS INC·Filed 2006·Granted Dec 7, 2010·12 cites·21 claims
- 4582US12094699B2Methods and apparatus for controlling ion fraction in physical vapor deposition processesAPPLIED MATERIALS INC·Filed 2023·Granted Sep 17, 2024·0 cites·20 claims
- 4682US9960021B2Physical vapor deposition (PVD) target having low friction padsAPPLIED MATERIALS INC·Filed 2014·Granted May 1, 2018·5 cites·13 claims
- 4782US7670436B2Support ring assemblyAPPLIED MATERIALS INC·Filed 2004·Granted Mar 2, 2010·26 cites·13 claims
- 4880US2025118543A1Novel arc management algorithm of RF generator and Match box for CCP plasma ChambersAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 4978US2022310363A1Methods and apparatus for processing a substrateAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 5078US2024301649A1CouplerMILLER UK LTD·Filed 2024·Application pending·0 cites
Showing the top 50 of 144 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →