Inventor · disambiguated record
Kirk J. Bertsche
Also filed as: BERTSCHE KIRK · BERTSCHE KIRK J · BERTSCHE KIRK JOSEPH
24 granted patents·2 pending applications·718 citations·filing 2001–2022
96Inventor score
Top patents by PatentIndex Score
26 records- 0198US7315022B1High-speed electron beam inspectionKLA TENCOR TECH CORP·Filed 2005·Granted Jan 1, 2008·59 cites·16 claims
- 0297US7276694B1Defect detection using energy spectrometerKLA TENCOR TECH CORP·Filed 2005·Granted Oct 2, 2007·45 cites·19 claims
- 0396US7253410B1Charge-control pre-scanning for e-beam imagingKLA TENCOR TECH CORP·Filed 2005·Granted Aug 7, 2007·49 cites·18 claims
- 0496US6407505B1Variable energy linear acceleratorSIEMENS MEDICAL SOLUTIONS·Filed 2001·Granted Jun 18, 2002·155 cites·40 claims
- 0593US6870172B1Maskless reflection electron beam projection lithographyKLA TENCOR TECH CORP·Filed 2004·Granted Mar 22, 2005·82 cites·34 claims
- 0692US7171038B2Method and apparatus for inspecting a substrateKLA TENCOR TECH CORP·Filed 2001·Granted Jan 30, 2007·42 cites·5 claims
- 0792US6646383B2Monolithic structure with asymmetric couplingSIEMENS MEDICAL SOLUTIONS·Filed 2001·Granted Nov 11, 2003·100 cites·10 claims
- 0891US10636609B1Bremsstrahlung target for radiation therapy systemACCURAY INC·Filed 2016·Granted Apr 28, 2020·27 cites·4 claims
- 0988US11375601B2Field replaceable, disposable, and thermally optimized X-ray target with integral beam current monitoringACCURAY INC·Filed 2020·Granted Jun 28, 2022·2 cites·20 claims
- 1086US7649365B1Inline inspection of photovoltaics for electrical defectsKLA TENCOR CORP·Filed 2007·Granted Jan 19, 2010·11 cites·1 claims
- 1184US7394069B1Large-field scanning of charged particlesKLA TENCOR TECH CORP·Filed 2005·Granted Jul 1, 2008·7 cites·20 claims
- 1281US6487274B2X-ray target assembly and radiation therapy systems and methodsSIEMENS MEDICAL SOLUTIONS·Filed 2001·Granted Nov 26, 2002·99 cites·22 claims
- 1379US11114269B2Bremsstrahlung target for radiation therapy systemACCURAY INC·Filed 2020·Granted Sep 7, 2021·1 cites·7 claims
- 1478US9170503B2Method and apparatus for inspecting a substrateADLER DAVID·Filed 2006·Granted Oct 27, 2015·4 cites·11 claims
- 1578US7507959B2Method for charging substrate to a potentialKLA TENCOR TECH CORP·Filed 2006·Granted Mar 24, 2009·3 cites·6 claims
- 1675US7446320B1Electronically-variable immersion electrostatic lensKLA TENCOR TECHNOLOGIES CORPRO·Filed 2005·Granted Nov 4, 2008·6 cites·13 claims
- 1771US7176468B2Method for charging substrate to a potentialKLA TENCOR TECH CORP·Filed 2004·Granted Feb 13, 2007·7 cites·8 claims
- 1870US9529279B2Method and apparatus for inspecting a substrateADLER DAVID·Filed 2006·Granted Dec 27, 2016·2 cites·6 claims
- 1968US11785699B2Field replaceable, disposable, and thermally optimized X-ray target with integral beam current monitoringACCURAY INC·Filed 2022·Granted Oct 10, 2023·0 cites·9 claims
- 2068US6822246B2Ribbon electron beam for inspection systemKLA TENCOR TECH CORP·Filed 2002·Granted Nov 23, 2004·7 cites·18 claims
- 2167US7906972B2Inline inspection of photovoltaics for electrical defectsKLA TENCOR CORP·Filed 2009·Granted Mar 15, 2011·2 cites·12 claims
- 2266US7391034B1Electron imaging beam with reduced space charge defocusingKLA TENCOR TECH CORP·Filed 2005·Granted Jun 24, 2008·1 cites·23 claims
- 2364US2017074810A1Method and apparatus for inspecting a substrateKLA TENCOR CORP·Filed 2016·Application pending·0 cites
- 2462US2021375575A1Bremsstrahlung target for radiation therapy systemACCURAY INC·Filed 2021·Application pending·0 cites
- 2561US7019292B1E-beam detection of defective contacts/vias with flooding and energy filterKLA TENCOR TECH CORP·Filed 2004·Granted Mar 28, 2006·7 cites·22 claims
- 2650US8427185B2Inline inspection of photovoltaics for electrical defectsZAPALAC JR GEORGE H·Filed 2011·Granted Apr 23, 2013·0 cites·1 claims
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