Inventor · disambiguated record
Wesley W. Zhang
Also filed as: ZHANG WESLEY W
4 granted patents·372 citations·filing 1987–2012
80Inventor score
Top patents by PatentIndex Score
4 records- 0196US4819167ASystem and method for detecting the center of an integrated circuit waferAPPLIED MATERIALS INC·Filed 1987·Granted Apr 4, 1989·279 cites·10 claims
- 0291US4927485ALaser interferometer system for monitoring and controlling IC processingAPPLIED MATERIALS INC·Filed 1988·Granted May 22, 1990·83 cites·4 claims
- 0384US8721847B2Homing of arbitrary scan path of a rotating magnetronCHANG YU·Filed 2012·Granted May 13, 2014·4 cites·10 claims
- 0481US8114256B2Control of arbitrary scan path of a rotating magnetronCHANG YU·Filed 2007·Granted Feb 14, 2012·6 cites·17 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →