Inventor · disambiguated record
Andrew An Zeng
Also filed as: AN ZENG ANDREW
2 granted patents·1 pending application·3 citations·filing 2011–2016
40Inventor score
Technology areasG01B
Top patents by PatentIndex Score
3 records- 0166US9163928B2Reducing registration error of front and back wafer surfaces utilizing a see-through calibration waferKLA TENCOR CORP·Filed 2013·Granted Oct 20, 2015·3 cites·18 claims
- 0250US9903708B2Method and apparatus to fold optics in tools for measuring shape and/or thickness of a large and thin substrateKLA TENCOR CORP·Filed 2016·Granted Feb 27, 2018·0 cites·20 claims
- 0335US2015176973A1A dual interferometer system with a short reference flat distance for wafer shape and thickness variation measurementTANG SHOUHONG·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →