Inventor · disambiguated record
Yo-Han Ahn
Also filed as: AHN YO-HAN
19 granted patents·6 pending applications·761 citations·filing 1997–2011
95Inventor score
Top patents by PatentIndex Score
25 records- 0195US7850449B2Heat treatment equipmentSAMSUNG ELECTRONICS CO LTD·Filed 2007·Granted Dec 14, 2010·466 cites·18 claims
- 0293US6402598B1Chemical mechanical polishing apparatus and method of washing contaminants off of the polishing head thereofSAMSUNG ELECTRONICS CO LTD·Filed 2000·Granted Jun 11, 2002·71 cites·12 claims
- 0388US8585391B2Photomask cleaning apparatus and methods of cleaning a photomask using the sameKIM JIN-HO·Filed 2011·Granted Nov 19, 2013·9 cites·17 claims
- 0487US6996453B2Substrate processing apparatus and method of processing substrate while controlling for contamination in substrate transfer moduleSAMSUNG ELECTRONICS CO LTD·Filed 2003·Granted Feb 7, 2006·52 cites·6 claims
- 0577US7065898B2Module for transferring a substrateSAMSUNG ELECTRONICS CO LTD·Filed 2004·Granted Jun 27, 2006·19 cites·22 claims
- 0674US8146447B2Contamination analysis unit and method thereof, and reticle cleaning systemLEE OK-SUN·Filed 2008·Granted Apr 3, 2012·7 cites·15 claims
- 0774US6370793B1Apparatus for controlling the temperature of a wafer located at a pre-alignment stageSAMSUNG ELECTRONICS CO LTD·Filed 2000·Granted Apr 16, 2002·18 cites·30 claims
- 0871US7258728B2Apparatus and method for cleaning airSAMSUNG ELECTRONICS CO LTD·Filed 2004·Granted Aug 21, 2007·19 cites·18 claims
- 0970US6613487B1Pre-alignment system of exposure apparatus having wafer cooling means and exposure method using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2000·Granted Sep 2, 2003·10 cites·9 claims
- 1069US8027017B2Substrate treating apparatus and exposing apparatus for cleaning a chuck cleaning tool with treating bathSAMSUNG ELECTRONICS CO LTD·Filed 2009·Granted Sep 27, 2011·5 cites·13 claims
- 1165US6522385B2Air shower head of photolithography equipment for directing air towards a wafer stageSAMSUNG ELECTRONICS CO LTD·Filed 2001·Granted Feb 18, 2003·12 cites·26 claims
- 1254US6036781AApparatus for guiding air current in a wafer loading chamber for chemical vapor deposition equipmentSAMSUNG ELECTRONICS CO LTD·Filed 1997·Granted Mar 14, 2000·24 cites·8 claims
- 1352US6093229ADrive checking system for fan filter units in clean roomSAMSUNG ELECTRONICS CO LTD·Filed 1998·Granted Jul 25, 2000·19 cites·13 claims
- 1452US5856623AParticle counter with sampling probe having adjustable intake areaSAMSUNG ELECTRONICS CO LTD·Filed 1997·Granted Jan 5, 1999·20 cites·9 claims
- 1548US7326284B2Contamination control system and air-conditioning system of a substrate processing apparatus using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2004·Granted Feb 5, 2008·2 cites·22 claims
- 1648US2006225299A1Method of transferring a substrateSAMSUNG ELECTRONICS CO LTD·Filed 2006·Application pending·0 cites
- 1747US7914594B2Air filtering device and cleaning system of semiconductor manufacturing apparatus with the sameSAMSUNG ELECTRONICS CO LTD·Filed 2008·Granted Mar 29, 2011·0 cites·17 claims
- 1842US2008137046A1Apparatus and method for exposing substrateSAMSUNG ELECTRONICS CO LTD·Filed 2007·Application pending·0 cites
- 1941US2007039470A1Apparatus and method for collecting contaminants from an air flow for manufacturing semiconductor devices and system using the sameKIM HA-NA·Filed 2006·Application pending·0 cites
- 2041US2007035715A1Exposure apparatus for manufacturing semiconductors and method for inspecting pelliclesSAMSUNG ELECTRONICS CO LTD·Filed 2006·Application pending·0 cites
- 2140US6737206B2Pre-alignment system of exposure apparatus having wafer cooling means and exposure method using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2003·Granted May 18, 2004·0 cites·6 claims
- 2238US6098023ADriving control system and monitoring device for fan filter unit in semiconductor clean roomSAMSUNG ELECTRONICS CO LTD·Filed 1997·Granted Aug 1, 2000·8 cites·20 claims
- 2338US2005091781A1Device for cleaning reticle boxSAMSUNG ELECTRONICS CO LTD·Filed 2004·Application pending·0 cites
- 2437US7161660B2Photolithography system and method of monitoring the sameSAMSUNG ELECTRONICS CO LTD·Filed 2004·Granted Jan 9, 2007·0 cites·15 claims
- 2535US2004159573A1Method for safely storing an object and apparatus having a storage box and a stocker for storing an objectFiled 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →