Inventor · disambiguated record
Harald Herchen
Also filed as: HERCHEN HARALD
70 granted patents·37 pending applications·2,482 citations·filing 1995–2024
99Inventor score
Top patents by PatentIndex Score
107 records- 0198US9452475B2Coatings for SOFC metallic interconnectsBLOOM ENERGY CORP·Filed 2013·Granted Sep 27, 2016·42 cites·13 claims
- 0298US7925377B2Cluster tool architecture for processing a substrateAPPLIED MATERIALS INC·Filed 2006·Granted Apr 12, 2011·45 cites·3 claims
- 0398US7743728B2Cluster tool architecture for processing a substrateAPPLIED MATERIALS INC·Filed 2008·Granted Jun 29, 2010·36 cites·16 claims
- 0498US7694647B2Cluster tool architecture for processing a substrateAPPLIED MATERIALS INC·Filed 2006·Granted Apr 13, 2010·42 cites·19 claims
- 0598US7357842B2Cluster tool architecture for processing a substrateSOKUDO CO LTD·Filed 2005·Granted Apr 15, 2008·106 cites·11 claims
- 0698US5819434AEtch enhancement using an improved gas distribution plateAPPLIED MATERIALS INC·Filed 1996·Granted Oct 13, 1998·608 cites·18 claims
- 0797US6692903B2Substrate cleaning apparatus and methodAPPLIED MATERIALS INC·Filed 2000·Granted Feb 17, 2004·414 cites·49 claims
- 0896US8146530B2Cluster tool architecture for processing a substrateISHIKAWA TETSUYA·Filed 2008·Granted Apr 3, 2012·22 cites·8 claims
- 0995US10593962B2Pre-formed powder delivery to powder press machineBLOOM ENERGY CORP·Filed 2016·Granted Mar 17, 2020·18 cites·8 claims
- 1095US10079393B1Method of fabricating an interconnect for a fuel cell stackBLOOM ENERGY CORP·Filed 2015·Granted Sep 18, 2018·8 cites·5 claims
- 1195US8550031B2Cluster tool architecture for processing a substrateISHIKAWA TETSUYA·Filed 2012·Granted Oct 8, 2013·13 cites·10 claims
- 1295US7087144B2Contact ring with embedded flexible contactsAPPLIED MATERIALS INC·Filed 2003·Granted Aug 8, 2006·35 cites·6 claims
- 1394US8962219B2Fuel cell interconnects and methods of fabricationBLOOM ENERGY CORP·Filed 2012·Granted Feb 24, 2015·10 cites·29 claims
- 1494US8215262B2Cluster tool architecture for processing a substrateISHIKAWA TETSUYA·Filed 2008·Granted Jul 10, 2012·15 cites·9 claims
- 1594US8181596B2Cluster tool architecture for processing a substrateISHIKAWA TETSUYA·Filed 2008·Granted May 22, 2012·15 cites·20 claims
- 1693US9570769B2Fuel cell interconnectBLOOM ENERGY CORP·Filed 2015·Granted Feb 14, 2017·4 cites·20 claims
- 1793US5948168ADistributed microwave plasma reactor for semiconductor processingAPPLIED MATERIALS INC·Filed 1997·Granted Sep 7, 1999·83 cites·29 claims
- 1892US6159297ASemiconductor process chamber and processing methodAPPLIED MATERIALS INC·Filed 1998·Granted Dec 12, 2000·90 cites·56 claims
- 1991US11870121B2Fuel cell column including stress mitigation structuresBLOOM ENERGY CORP·Filed 2022·Granted Jan 9, 2024·1 cites·20 claims
- 2091US6444040B1Gas distribution plateAPPLIED MATERIALS INC·Filed 2000·Granted Sep 3, 2002·56 cites·18 claims
- 2189US5702530ADistributed microwave plasma reactor for semiconductor processingAPPLIED MATERIALS INC·Filed 1995·Granted Dec 30, 1997·76 cites·64 claims
- 2288US8802331B2Non-destructive testing methods for fuel cell interconnect manufacturingHERCHEN HARALD·Filed 2011·Granted Aug 12, 2014·9 cites·21 claims
- 2388US6264852B1Substrate process chamber and processing methodAPPLIED MATERIALS INC·Filed 2000·Granted Jul 24, 2001·38 cites·47 claims
- 2487US9993874B2Composition and processing of metallic interconnects for SOFC stacksSTACKPOLE INT·Filed 2015·Granted Jun 12, 2018·6 cites·17 claims
- 2587US2025030012A1Fuel cell interconnect optimized for operation in hydrogen fuelBLOOM ENERGY CORP·Filed 2024·Application pending·0 cites
- 2686US7521915B2Wafer bevel particle detectionSOKUDO CO LTD·Filed 2006·Granted Apr 21, 2009·12 cites·20 claims
- 2786US7497026B2Method and system for detection of wafer centering in a track lithography toolSOKUDO CO LTD·Filed 2007·Granted Mar 3, 2009·14 cites·18 claims
- 2884US5870271APressure actuated sealing diaphragm for chucksAPPLIED MATERIALS INC·Filed 1997·Granted Feb 9, 1999·72 cites·27 claims
- 2984US5780359APolymer removal from top surfaces and sidewalls of a semiconductor waferAPPLIED MATERIALS INC·Filed 1995·Granted Jul 14, 1998·67 cites·12 claims
- 3084US5737178AMonocrystalline ceramic coating having integral bonding interconnects for electrostatic chucksAPPLIED MATERIALS INC·Filed 1997·Granted Apr 7, 1998·70 cites·58 claims
- 3183US6072685AElectrostatic chuck having an electrical connector with housingAPPLIED MATERIALS INC·Filed 1998·Granted Jun 6, 2000·65 cites·36 claims
- 3282US9196909B2Fuel cell interconnect heat treatment methodBLOOM ENERGY CORP·Filed 2012·Granted Nov 24, 2015·2 cites·20 claims
- 3382US8785821B2Substrate processing apparatus with heater element held by vacuumHERCHEN HARALD·Filed 2010·Granted Jul 22, 2014·6 cites·6 claims
- 3482US7285195B2Electric field reducing thrust plateAPPLIED MATERIALS INC·Filed 2004·Granted Oct 23, 2007·25 cites·20 claims
- 3581US9958406B1Method of measurement and estimation of the coefficient of thermal expansion in componentsBLOOM ENERGY CORP·Filed 2014·Granted May 1, 2018·3 cites·11 claims
- 3681US6015761AMicrowave-activated etching of dielectric layersAPPLIED MATERIALS INC·Filed 1996·Granted Jan 18, 2000·62 cites·37 claims
- 3780US12132234B2Fuel cell interconnect optimized for operation in hydrogen fuelBLOOM ENERGY CORP·Filed 2022·Granted Oct 29, 2024·0 cites·21 claims
- 3880US10873092B2Fuel cell interconnect with reduced voltage degradation and manufacturing methodBLOOM ENERGY CORP·Filed 2018·Granted Dec 22, 2020·1 cites·11 claims
- 3980US9678501B2Serialization of fuel cell componentsBLOOM ENERGY CORP·Filed 2014·Granted Jun 13, 2017·4 cites·10 claims
- 4080US9502721B2Pre-formed powder delivery to powder press machineBLOOM ENERGY CORP·Filed 2014·Granted Nov 22, 2016·2 cites·3 claims
- 4179US9468736B2Fuel cell interconnect with reduced voltage degradation over timeBLOOM ENERGY CORP·Filed 2014·Granted Oct 18, 2016·10 cites·22 claims
- 4277US7371022B2Developer endpoint detection in a track lithography systemSOKUDO CO LTD·Filed 2005·Granted May 13, 2008·2 cites·10 claims
- 4376US5789322ALow volume gas distribution assembly for a chemical downstream etch toolAPPLIED MATERIALS INC·Filed 1997·Granted Aug 4, 1998·26 cites·20 claims
- 4474US7517469B2Method and system to measure flow velocity and volumeSOKUDO CO LTD·Filed 2006·Granted Apr 14, 2009·4 cites·14 claims
- 4574US2024332560A1Electrochemical cell stacks including interconnect end platesBLOOM ENERGY CORP·Filed 2024·Application pending·0 cites
- 4673US7138039B2Liquid isolation of contact ringsAPPLIED MATERIALS INC·Filed 2003·Granted Nov 21, 2006·7 cites·6 claims
- 4771US9847520B1Thermal processing of interconnectsBLOOM ENERGY CORP·Filed 2013·Granted Dec 19, 2017·1 cites·18 claims
- 4871US6875331B2Anode isolation by diffusion differentialsAPPLIED MATERIALS INC·Filed 2002·Granted Apr 5, 2005·6 cites·39 claims
- 4971US6088213ABipolar electrostatic chuck and method of making sameAPPLIED MATERIALS INC·Filed 1997·Granted Jul 11, 2000·37 cites·10 claims
- 5069US6592673B2Apparatus and method for detecting a presence or position of a substrateAPPLIED MATERIALS INC·Filed 1999·Granted Jul 15, 2003·36 cites·32 claims
Showing the top 50 of 107 patent records by PatentIndex Score.
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