Inventor · disambiguated record
Justin Phi
Also filed as: PHI JUSTIN
7 granted patents·2 pending applications·157 citations·filing 2013–2019
83Inventor score
Top patents by PatentIndex Score
9 records- 0198US9872373B1Smart multi-level RF pulsing methodsAPPLIED MATERIALS INC·Filed 2017·Granted Jan 16, 2018·102 cites·20 claims
- 0297US9788405B2RF power delivery with approximated saw tooth wave pulsingAPPLIED MATERIALS INC·Filed 2015·Granted Oct 10, 2017·47 cites·20 claims
- 0387US9741539B2RF power delivery regulation for processing substratesAPPLIED MATERIALS INC·Filed 2015·Granted Aug 22, 2017·4 cites·15 claims
- 0474US10468233B2RF power delivery regulation for processing substratesAPPLIED MATERIALS INC·Filed 2017·Granted Nov 5, 2019·1 cites·20 claims
- 0573US10490429B2Substrate carrier using a proportional thermal fluid delivery systemAPPLIED MATERIALS INC·Filed 2014·Granted Nov 26, 2019·2 cites·14 claims
- 0671US10854427B2Radio frequency (RF) pulsing impedance tuning with multiplier modeAPPLIED MATERIALS INC·Filed 2018·Granted Dec 1, 2020·1 cites·20 claims
- 0760US11615973B2Substrate carrier using a proportional thermal fluid delivery systemAPPLIED MATERIALS INC·Filed 2019·Granted Mar 28, 2023·0 cites·7 claims
- 0850US2014224767A1Automated algorithm for tuning of feedforward control parameters in plasma processing systemMERRY WALTER R·Filed 2014·Application pending·0 cites
- 0942US2014342570A1Etch process having adaptive control with etch depth of pressure and powerAPPLIED MATERIALS INC·Filed 2013·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →