Inventor · disambiguated record
Steven R. Lange
Also filed as: LANGE STEVEN · LANGE STEVEN R
27 granted patents·3 pending applications·825 citations·filing 1976–2017
97Inventor score
Top patents by PatentIndex Score
30 records- 0196US8912495B2Multi-spectral defect inspection for 3D wafersKLA TENCOR CORP·Filed 2013·Granted Dec 16, 2014·18 cites·22 claims
- 0296US6020957ASystem and method for inspecting semiconductor wafersKLA TENCOR CORP·Filed 1998·Granted Feb 1, 2000·205 cites·38 claims
- 0394US7130037B1Systems for inspecting wafers and reticles with increased resolutionKLA TENCOR TECH CORP·Filed 2003·Granted Oct 31, 2006·59 cites·20 claims
- 0493US10082470B2Defect marking for semiconductor wafer inspectionKLA TENCOR CORP·Filed 2017·Granted Sep 25, 2018·9 cites·21 claims
- 0593US9696264B2Apparatus and methods for determining defect depths in vertical stack memoryKLA TENCOR CORP·Filed 2014·Granted Jul 4, 2017·21 cites·22 claims
- 0693US9075027B2Apparatus and methods for detecting defects in vertical memoryKLA TENCOR CORP·Filed 2013·Granted Jul 7, 2015·9 cites·23 claims
- 0793US6788404B2Inspection system with multiple illumination sourcesKLA TENCOR TECH CORP·Filed 2002·Granted Sep 7, 2004·56 cites·22 claims
- 0892US7351980B2All-reflective optical systems for broadband wafer inspectionKLA TENCOR TECH CORP·Filed 2005·Granted Apr 1, 2008·19 cites·27 claims
- 0990US4984893APhase shifting device and methodWYKO CORP·Filed 1989·Granted Jan 15, 1991·57 cites·17 claims
- 1088US7001055B1Uniform pupil illumination for optical inspection systemsKLA TENCOR TECH CORP·Filed 2004·Granted Feb 21, 2006·37 cites·27 claims
- 1186US9612209B2Apparatus and methods for detecting defects in vertical memoryKLA TENCOR CORP·Filed 2015·Granted Apr 4, 2017·2 cites·20 claims
- 1286US9558858B2System and method for imaging a sample with a laser sustained plasma illumination outputKLA TENCOR CORP·Filed 2014·Granted Jan 31, 2017·9 cites·31 claims
- 1386US4120666AHollow core synthetic fireplace log and method and apparatus for producing sameLANGE STEVEN R·Filed 1976·Granted Oct 17, 1978·34 cites·21 claims
- 1485US9599573B2Inspection systems and techniques with enhanced detectionKLA TENCOR CORP·Filed 2015·Granted Mar 21, 2017·2 cites·20 claims
- 1584US6603541B2Wafer inspection using optimized geometryKLA TENCOR TECH CORP·Filed 2001·Granted Aug 5, 2003·24 cites·23 claims
- 1681US6062624ASealing acoustical baffle and method thereforLEAR CORP·Filed 1998·Granted May 16, 2000·50 cites·16 claims
- 1780US10126251B2Inspection systems and techniques with enhanced detectionKLA—TENCOR CORP·Filed 2017·Granted Nov 13, 2018·1 cites·16 claims
- 1879US6791680B1System and method for inspecting semiconductor wafersKLA TENCOR CORP·Filed 1999·Granted Sep 14, 2004·49 cites·16 claims
- 1976US8705027B2Optical defect amplification for improved sensitivity on patterned layersLANGE STEVEN R·Filed 2010·Granted Apr 22, 2014·3 cites·16 claims
- 2076US7465141B1Multilevel vertical general aviation hangarA V STAK SYSTEMS INC·Filed 2006·Granted Dec 16, 2008·21 cites·3 claims
- 2169US6862142B2Multi-detector microscopic inspection systemKLA TENCOR TECH CORP·Filed 2002·Granted Mar 1, 2005·11 cites·49 claims
- 2269US6570650B1Apparatus and methods for reducing thin film color variation in optical inspection of semiconductor devices and other surfacesKLA TENOR CORP·Filed 2001·Granted May 27, 2003·17 cites·35 claims
- 2363US7352456B2Method and apparatus for inspecting a substrate using a plurality of inspection wavelength regimesKLA TENCOR TECH CORP·Filed 2003·Granted Apr 1, 2008·4 cites·28 claims
- 2461US2015069241A1Multi-Spectral Defect Inspection for 3D WafersKLA TENCOR CORP·Filed 2014·Application pending·0 cites
- 2560US5055695AAlignment system and method for infrared interferometerWYKO CORP·Filed 1990·Granted Oct 8, 1991·20 cites·10 claims
- 2657US5116115AMethod and apparatus for measuring corneal topographyWYKO CORP·Filed 1990·Granted May 26, 1992·84 cites·18 claims
- 2756US7031796B2Radiation damage reductionKLA TENCOR TECH CORP·Filed 2003·Granted Apr 18, 2006·4 cites·20 claims
- 2850US2017161418A1Using three-dimensional representations for defect-related applicationsKLA TENCOR CORP·Filed 2017·Application pending·0 cites
- 2946US2012316855A1Using Three-Dimensional Representations for Defect-Related ApplicationsPARK ALLEN·Filed 2011·Application pending·0 cites
- 3037US11035804B2System and method for x-ray imaging and classification of volume defectsKLA TENCOR CORP·Filed 2017·Granted Jun 15, 2021·0 cites·51 claims
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