Inventor · disambiguated record
Christopher Morath
Also filed as: MORATH CHRISTOPHER · MORATH CHRISTOPHER J
10 granted patents·1 pending application·101 citations·filing 2002–2019
89Inventor score
Top patents by PatentIndex Score
11 records- 0189US10985046B2Micro-LED transfer methods using light-based debondingVEECO INSTR INC·Filed 2019·Granted Apr 20, 2021·5 cites·25 claims
- 0285US7006221B2Metrology system with spectroscopic ellipsometer and photoacoustic measurementsRUDOLPH TECHNOLOGIES INC·Filed 2002·Granted Feb 28, 2006·21 cites·22 claims
- 0384US6504618B2Method and apparatus for decreasing thermal loading and roughness sensitivity in a photoacoustic film thickness measurement systemRUDOLPH TECHNOLOGIES INC·Filed 2002·Granted Jan 7, 2003·29 cites·25 claims
- 0480US9041931B2Substrate analysis using surface acoustic wave metrologyCOLGAN MICHAEL·Filed 2010·Granted May 26, 2015·7 cites·30 claims
- 0578US10571430B2Gas concentration sensors and systemsVEECO INSTR INC·Filed 2017·Granted Feb 25, 2020·2 cites·10 claims
- 0677US7522272B2Metrology system with spectroscopic ellipsometer and photoacoustic measurementsRUDOLPH TECHNOLOGIES INC·Filed 2007·Granted Apr 21, 2009·7 cites·4 claims
- 0773US7050178B2Method and apparatus for increasing signal to noise ratio in a photoacoustic film thickness measurement systemRUDOLPH TECHNOLOGIES INC·Filed 2002·Granted May 23, 2006·18 cites·18 claims
- 0871US7253887B2Metrology system with spectroscopic ellipsometer and photoacoustic measurementsRUDOLPH TECHNOLOGIES INC·Filed 2006·Granted Aug 7, 2007·2 cites·38 claims
- 0968US7019845B1Measuring elastic moduli of dielectric thin films using an optical metrology systemRUDOLPH TECHNOLOGIES INC·Filed 2004·Granted Mar 28, 2006·10 cites·36 claims
- 1060US7705974B2Metrology system with spectroscopic ellipsometer and photoacoustic measurementsRUDOLPH TECHNOLOGIES INC·Filed 2009·Granted Apr 27, 2010·0 cites·16 claims
- 1142US2006256916A1Combined ultra-fast x-ray and optical system for thin film measurementsRUDOLPH TECHNOLOGIES INC·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →