Inventor · disambiguated record
Shardul S. Patel
Also filed as: PATEL SHARDUL · PATEL SHARDUL S
14 granted patents·2 pending applications·42 citations·filing 2008–2022
88Inventor score
Files withAPPLIED MATERIALS INC6VARIAN SEMICONDUCTOR EQUIPMENT3BENVENISTE VICTOR2VARIAN SEMICONDUCTOR EQUIPMENT ASS INC2BUFF JAMES S1
Top patents by PatentIndex Score
16 records- 0192US8436318B2Apparatus for controlling the temperature of an RF ion source windowSINCLAIR FRANK·Filed 2010·Granted May 7, 2013·16 cites·18 claims
- 0286US10704693B2Cryogenic ferrofluid sealed rotary unionVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2018·Granted Jul 7, 2020·3 cites·18 claims
- 0385US8188448B2Temperature controlled ion sourceBENVENISTE VICTOR·Filed 2010·Granted May 29, 2012·8 cites·12 claims
- 0483US9384937B2SiC coating in an ion implanterVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Jul 5, 2016·5 cites·14 claims
- 0572US12154766B2Ion source having different modes of operationAPPLIED MATERIALS INC·Filed 2022·Granted Nov 26, 2024·0 cites·19 claims
- 0672US8003956B2Method and apparatus for controlling beam current uniformity in an ion implanterVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2008·Granted Aug 23, 2011·3 cites·18 claims
- 0769US8183542B2Temperature controlled ion sourceBENVENISTE VICTOR·Filed 2010·Granted May 22, 2012·2 cites·19 claims
- 0868US11149345B2Cryogenically cooled rotatable electrostatic chuckAPPLIED MATERIALS INC·Filed 2017·Granted Oct 19, 2021·1 cites·18 claims
- 0968US8466431B2Techniques for improving extracted ion beam quality using high-transparency electrodesBUFF JAMES S·Filed 2009·Granted Jun 18, 2013·3 cites·20 claims
- 1066US12094681B2Hybrid ion source for aluminum ion generation using a target holder and a solid targetAPPLIED MATERIALS INC·Filed 2022·Granted Sep 17, 2024·0 cites·19 claims
- 1166US12040154B2Hybrid ion source for aluminum ion generation using organoaluminium compounds and a solid targetAPPLIED MATERIALS INC·Filed 2022·Granted Jul 16, 2024·0 cites·19 claims
- 1256US12191113B2Systems and methods for optimizing full horizontal scanned beam distanceAPPLIED MATERIALS INC·Filed 2022·Granted Jan 7, 2025·0 cites·20 claims
- 1355US9793086B2SiC coating in an ion implanterVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2016·Granted Oct 17, 2017·0 cites·14 claims
- 1454US2023369006A1Hybrid ion source for aluminum ion generation using a target holder and organoaluminium compoundsAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 1552US8907295B2Hybrid electrostatic lens with increased natural frequencyNAUMOVSKI OLIVER V·Filed 2012·Granted Dec 9, 2014·1 cites·18 claims
- 1649US2015048254A1Hybrid electrostatic lens with increased natural frequencyVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2014·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →