Inventor · disambiguated record
Subbalakshmi Sreekala
Also filed as: SREEKALA SUBBALAKSHMI
2 granted patents·2 pending applications·5 citations·filing 2012–2015
50Inventor score
Top patents by PatentIndex Score
4 records- 0179US9490116B2Gate stack materials for semiconductor applications for lithographic overlay improvementAPPLIED MATERIALS INC·Filed 2015·Granted Nov 8, 2016·3 cites·20 claims
- 0264US9305838B2BEOL interconnect with carbon nanotubesNARWANKAR PRAVIN K·Filed 2012·Granted Apr 5, 2016·2 cites·15 claims
- 0354US2014272184A1Methods for maintaining clean etch rate and reducing particulate contamination with pecvd of amorphous silicon filimsAPPLIED MATERIALS INC·Filed 2014·Application pending·0 cites
- 0442US2016260602A1Adhesion improvements for oxide-silicon stackAPPLIED MATERIALS INC·Filed 2014·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →