Inventor · disambiguated record
Zonghui Su
Also filed as: SU ZONGHUI
3 granted patents·2 pending applications·4 citations·filing 2017–2021
57Inventor score
Technology areasH10P
Files withAPPLIED MATERIALS INC5
Top patents by PatentIndex Score
5 records- 0182US10276364B2Bevel etch profile controlAPPLIED MATERIALS INC·Filed 2017·Granted Apr 30, 2019·3 cites·20 claims
- 0272US10629427B2Bevel etch profile controlAPPLIED MATERIALS INC·Filed 2019·Granted Apr 21, 2020·1 cites·20 claims
- 0361US2021296144A1Substrate support pedestal having plasma confinement featuresAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
- 0449US10599043B2Critical methodology in vacuum chambers to determine gap and leveling between wafer and hardware componentsAPPLIED MATERIALS INC·Filed 2017·Granted Mar 24, 2020·0 cites·20 claims
- 0548US2017306494A1Substrate support pedestal having plasma confinement featuresAPPLIED MATERIALS INC·Filed 2017·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →