Inventor · disambiguated record
Makio Higashi
Also filed as: HIGASHI MAKIO
6 granted patents·2 pending applications·535 citations·filing 2003–2009
84Inventor score
Technology areasH10P
Top patents by PatentIndex Score
8 records- 0197US7379785B2Substrate processing system, coating/developing apparatus, and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2003·Granted May 27, 2008·492 cites·11 claims
- 0286US7210864B2Coating and developing apparatusTOKYO ELECTRON LTD·Filed 2005·Granted May 1, 2007·13 cites·18 claims
- 0385US7191033B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2005·Granted Mar 13, 2007·12 cites·7 claims
- 0480US7383093B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2006·Granted Jun 3, 2008·8 cites·12 claims
- 0565US7840299B2Substrate collection method and substrate treatment apparatusTOKYO ELECTRON LTD·Filed 2005·Granted Nov 23, 2010·2 cites·14 claims
- 0660US6981808B2Substrate processing apparatus and substrate transferring methodTOKYO ELECTRON LTD·Filed 2003·Granted Jan 3, 2006·8 cites·17 claims
- 0752US2009149982A1Substrate processing apparatus, substrate processing method, and computer programHIGASHI MAKIO·Filed 2009·Application pending·0 cites
- 0846US2006011296A1Substrate processing apparatus, substrate processing method, and computer programTOKYO ELECTRON LTD·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →