Substrate processing apparatus, substrate processing method, and computer program

Abstract

In the present invention, when a ghost wafer which is not recognized by a control unit on a coating and developing treatment apparatus side is carried out of another apparatus which is connected to the coating and developing treatment apparatus, the ghost wafer is temporarily housed in a buffer cassette on the coating and developing treatment apparatus side. The ghost wafer in the buffer cassette is then collected into a carry-in/out section on the coating and developing treatment apparatus side through use of a carrier unit at a timing which does not affect processing of other wafers According to the present invention, the ghost wafer occurred in the coating and developing treatment apparatus can be collected without suspension of processing of other ordinary substrates.

1 . A substrate processing apparatus comprising: a carry-in/out section for carrying substrates in/out; a processing section for processing the substrates; a substrate carrier means capable of carrying the substrates carried in said carry-in/out section to said processing section and from said processing section toward another apparatus side, and carrying the substrates carried out of said other apparatus to said processing section and from said processing section to said carry-in/out section; and a control unit for controlling the carriage of the substrates by said substrate carrier means, 
 said control unit controlling the carriage of each of the substrates while individually managing the substrates carried by said substrate carrier means, and    if an unrecognized substrate which is not recognized by said control unit is carried out of said other apparatus, said control unit controlling carriage of the unrecognized substrate to said carry-in/out section using said substrate carrier means to collect the unrecognized substrate.    
     
     
         2 . The substrate processing apparatus as set forth in  claim 1 , wherein 
 said control unit controls the carriage of the unrecognized substrate to said carry-in/out section to collect the unrecognized substrate in a manner not to interfere with processing of ordinary substrates which are recognized by said control unit.    
     
     
         3 . The substrate processing apparatus as set forth in  claim 2 , further comprising 
 a housing unit for housing the unrecognized substrate,    wherein said control unit controls temporary housing of the unrecognized substrate carried out of said other apparatus into said housing unit using said substrate carrier means and carriage of the unrecognized substrate in said housing unit to said carry-in/out section using said substrate carrier means at a timing which does not interfere with the processing of the ordinary substrates.    
     
     
         4 . The substrate processing apparatus as set forth in  claim 3 , further comprising 
 a transfer section for performing transfer between said processing section and said other apparatus,    wherein said substrate carrier means carries the substrates between said processing section and said other apparatus via said transfer section, and    wherein said housing unit is provided in said transfer section.    
     
     
         5 . The substrate processing apparatus as set forth in  claim 2 , wherein 
 said control unit conducts control such that the carriage of the unrecognized substrate to said carry-in/out section is performed in a break between lots of the ordinary substrate.    
     
     
         6 . A substrate processing method using a substrate processing apparatus, said apparatus comprising: a carry-in/out section for carrying substrates in/out; a processing section for processing the substrates; a substrate carrier means capable of carrying the substrates carried in the carry-in/out section to the processing section and from the processing section toward another apparatus side, and carrying the substrates carried out of the other apparatus to the processing section and from the processing section to the carry-in/out section; and a control unit for controlling the carriage of the substrates by the substrate carrier means, said method comprising the steps of: 
 the control unit controlling the carriage of each of the substrates while individually managing the substrates carried by the substrate carrier means, and    if an unrecognized substrate which is not recognized by the control unit is carried out of the other apparatus, carrying the unrecognized substrate to the carry-in/out section using the substrate carrier means to collect the unrecognized substrate.    
     
     
         7 . The substrate processing method as set forth in  claim 6 , wherein 
 the unrecognized substrate is carried to the carry-in/out section to be collected in a manner not to interfere with processing of ordinary substrates which are recognized by the control unit.    
     
     
         8 . The substrate processing method as set forth in  claim 7 , wherein 
 the unrecognized substrate from the other apparatus is temporarily housed into a housing unit using the substrate carrier means, and the unrecognized substrate in the housing unit is carried to the carry-in/out section using the substrate carrier means at a timing which does not interfere with the processing of the ordinary substrates.    
     
     
         9 . The substrate processing method as set forth in  claim 6 , wherein 
 the carriage of the unrecognized substrate to the carry-in/out section is performed in a break between lots of the ordinary substrates.    
     
     
         10 . A computer program product for processing in a substrate processing apparatus, said apparatus comprising: a carry-in/out section for carrying substrates in/out; a processing section for processing the substrates; a substrate carrier means capable of carrying the substrates carried in the carry-in/out section to the processing section and from the processing section toward another apparatus side, and carrying the substrates carried out of the other apparatus to the processing section and from the processing section to the carry-in/out section; and a control unit for controlling the carriage of the substrates, said computer program product comprising: 
 computer readable program code means for causing a computer to execute processing to individually manage, using the control unit, the substrates carried by the substrate carrier means, and, if an unrecognized substrate which is not recognized by the control unit is carried out of the other apparatus, to carry the unrecognized substrate to the carry-in/out section using the substrate carrier means to collect the unrecognized substrate.    
     
     
         11 . The computer program product as set forth in  claim 10 , wherein 
 the unrecognized substrate is carried to the carry-in/out section to be collected in a manner not to interfere with processing of ordinary substrates which are recognized by the control unit.    
     
     
         12 . The computer program product as set forth in  claim 11 , wherein 
 the unrecognized substrate carried out of the other apparatus is temporarily housed in a housing unit by the substrate carrier means, and the unrecognized substrate in the housing unit is carried to the carry-in/out section by the substrate carrier means at a timing which does not interfere with the processing of the ordinary substrates.    
     
     
         13 . The computer program product as set forth in  claim 10 , wherein 
 the carriage of the unrecognized substrate to the carry-in/out section is performed in a break between lots of the ordinary substrates.