Inventor · disambiguated record
Irina Vakshtein
Also filed as: VAKSHTEIN IRINA
2 granted patents·1 pending application·5 citations·filing 2012–2022
49Inventor score
Top patents by PatentIndex Score
3 records- 0180US11372340B2Method and system for providing a quality metric for improved process controlKANDEL DANIEL·Filed 2012·Granted Jun 28, 2022·4 cites·22 claims
- 0269US2023051705A1Method and System for Providing a Quality Metric for Improved Process ControlKLA CORP·Filed 2022·Application pending·0 cites
- 0365US9909982B2Pupil plane calibration for scatterometry overlay measurementKLA TENCOR CORP·Filed 2014·Granted Mar 6, 2018·1 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →