Inventor · disambiguated record
Joachim Hainz
Also filed as: HAINZ JOACHIM
11 granted patents·6 pending applications·135 citations·filing 2002–2008
91Inventor score
Top patents by PatentIndex Score
17 records- 0192US7321126B2Collector with fastening devices for fastening mirror shellsZEISS CARL SMT AG·Filed 2006·Granted Jan 22, 2008·26 cites·10 claims
- 0292US7244954B2Collector having unused region for illumination systems using a wavelength ≦193 nmZEISS CARL SMT AG·Filed 2005·Granted Jul 17, 2007·14 cites·27 claims
- 0391US7015489B2Collector having unused region for illumination systems using a wavelength less than or equal to 193 nmZEISS CARL SMT AG·Filed 2003·Granted Mar 21, 2006·36 cites·21 claims
- 0486US7460212B2Collector configured of mirror shellsZEISS CARL SMT AG·Filed 2007·Granted Dec 2, 2008·11 cites·14 claims
- 0579US7006595B2Illumination system particularly for microlithographyZEISS CARL SEMICONDUCTOR MFG·Filed 2002·Granted Feb 28, 2006·15 cites·22 claims
- 0678US7362414B2Optical system having an optical element that can be brought into at least two positionsZEISS CARL SMT AG·Filed 2005·Granted Apr 22, 2008·8 cites·45 claims
- 0770US7443948B2Illumination system particularly for microlithographyZEISS CARL SMT AG·Filed 2006·Granted Oct 28, 2008·2 cites·31 claims
- 0869US7405809B2Illumination system particularly for microlithographyZEISS CARL SMT AG·Filed 2006·Granted Jul 29, 2008·6 cites·23 claims
- 0967US7091505B2Collector with fastening devices for fastening mirror shellsZEISS CARL SMT AG·Filed 2004·Granted Aug 15, 2006·8 cites·11 claims
- 1064US7126137B2Illumination system with field mirrors for producing uniform scanning energyZEISS CARL SMT AG·Filed 2004·Granted Oct 24, 2006·9 cites·33 claims
- 1151US2009015812A1Illumination system particularly for microlithographyZEISS CARL SMT AG·Filed 2008·Application pending·0 cites
- 1247US2007283591A1EUV-lithography apparatus having a chamber for cleaning an optical elementZEISS CARL SMT AG·Filed 2007·Application pending·0 cites
- 1345US2008225387A1COLLECTOR FOR ILLUMINATION SYSTEMS WITH A WAVELENGTH LESS THAN OR EQUAL TO 193 nmZEISS CARL SMT AG·Filed 2008·Application pending·0 cites
- 1445US2008042079A1Collector with fastening devices for fastening mirror shellsCARL ZEISS SMT·Filed 2007·Application pending·0 cites
- 1544US2008165925A1Double-facetted illumination system with attenuator elements on the pupil facet mirrorZEISS CARL SMT AG·Filed 2007·Application pending·0 cites
- 1641US2007030948A1Illumination system with field mirrors for producing uniform scanning energyZEISS CARL SMT AG·Filed 2006·Application pending·0 cites
- 1735US7911584B2Illumination system for microlithographyZEISS CARL SMT GMBH·Filed 2004·Granted Mar 22, 2011·0 cites·17 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →