Inventor · disambiguated record
Haruo Amada
Also filed as: AMADA HARUO
10 granted patents·1 pending application·327 citations·filing 1984–2012
91Inventor score
Top patents by PatentIndex Score
11 records- 0190US7687907B2Semiconductor device and manufacturing method of the sameRENESAS TECH CORP·Filed 2007·Granted Mar 30, 2010·20 cites·14 claims
- 0287US5134962ASpin coating apparatusHITACHI LTD·Filed 1990·Granted Aug 4, 1992·146 cites·23 claims
- 0384US5857661AValve drive control method, valve drive control apparatus and fluid member supply apparatusHITACHI LTD·Filed 1995·Granted Jan 12, 1999·47 cites·7 claims
- 0483US4593168AMethod and apparatus for the heat-treatment of a plate-like memberHITACHI LTD·Filed 1984·Granted Jun 3, 1986·49 cites·2 claims
- 0580US7335574B2Semiconductor device and manufacturing method of the sameRENESAS TECH CORP·Filed 2005·Granted Feb 26, 2008·8 cites·12 claims
- 0678US8039276B2Manufacturing method of semiconductor deviceRENESAS ELECTRONICS CORP·Filed 2010·Granted Oct 18, 2011·5 cites·20 claims
- 0777US7977165B2Method of manufacturing a semiconductor deviceRENESAS ELECTRONICS CORP·Filed 2009·Granted Jul 12, 2011·6 cites·19 claims
- 0876US8153452B2Manufacturing method of semiconductor deviceAMADA HARUO·Filed 2011·Granted Apr 10, 2012·5 cites·20 claims
- 0975US4667076AMethod and apparatus for microwave heat-treatment of a semiconductor waterHITACHI LTD·Filed 1985·Granted May 19, 1987·39 cites·17 claims
- 1062US8492176B2Method of manufacturing semiconductor deviceAMADA HARUO·Filed 2012·Granted Jul 23, 2013·2 cites·18 claims
- 1148US2011212609A1Method of manufacturing a semiconductor deviceRENESAS ELECTRONICS CORP·Filed 2011·Application pending·0 cites
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