Inventor · disambiguated record
Scott L. Battle
Also filed as: BATTLE SCOTT · BATTLE SCOTT L
28 granted patents·20 pending applications·1,537 citations·filing 2000–2025
97Inventor score
Top patents by PatentIndex Score
48 records- 0198US8821640B2Solid precursor-based delivery of fluid utilizing controlled solids morphologyCLEARY JOHN M·Filed 2007·Granted Sep 2, 2014·536 cites·21 claims
- 0297US10465286B2Method and apparatus to help promote contact of gas with vaporized materialENTEGRIS INC·Filed 2016·Granted Nov 5, 2019·10 cites·16 claims
- 0397US9469898B2Method and apparatus to help promote contact of gas with vaporized materialENTEGRIS INC·Filed 2015·Granted Oct 18, 2016·10 cites·31 claims
- 0497US8444120B2Method and apparatus to help promote contact of gas with vaporized materialGREGG JOHN N·Filed 2012·Granted May 21, 2013·546 cites·2 claims
- 0596US10392700B2Solid vaporizerENTEGRIS INC·Filed 2015·Granted Aug 27, 2019·14 cites·15 claims
- 0696US8128073B2Method and apparatus to help promote contact of gas with vaporized materialGREGG JOHN N·Filed 2010·Granted Mar 6, 2012·19 cites·11 claims
- 0796US7828274B2Method and apparatus to help promote contact of gas with vaporized materialADVANCED TECH MATERIALS·Filed 2009·Granted Nov 9, 2010·19 cites·17 claims
- 0896US6921062B2Vaporizer delivery ampouleADVANCED TECH MATERIALS·Filed 2002·Granted Jul 26, 2005·189 cites·33 claims
- 0995US10895010B2Solid precursor-based delivery of fluid utilizing controlled solids morphologyENTEGRIS INC·Filed 2016·Granted Jan 19, 2021·5 cites·18 claims
- 1095US7556244B2Method and apparatus to help promote contact of gas with vaporized materialADVANCED TECH MATERIALS·Filed 2007·Granted Jul 7, 2009·28 cites·44 claims
- 1194US9004462B2Method and apparatus to help promote contact of gas with vaporized materialADVANCED TECH MATERIALS·Filed 2013·Granted Apr 14, 2015·9 cites·16 claims
- 1294US7487956B2Method and apparatus to help promote contact of gas with vaporized materialADVANCED TECH MATERIALS·Filed 2007·Granted Feb 10, 2009·27 cites·32 claims
- 1394US7300038B2Method and apparatus to help promote contact of gas with vaporized materialADVANCED TECH MATERIALS·Filed 2004·Granted Nov 27, 2007·67 cites·50 claims
- 1492US10526697B2High-purity tungsten hexacarbonyl for solid source deliveryENTEGRIS INC·Filed 2016·Granted Jan 7, 2020·4 cites·18 claims
- 1591US10385452B2Source reagent-based delivery of fluid with high material flux for batch depositionENTEGRIS INC·Filed 2013·Granted Aug 20, 2019·11 cites·22 claims
- 1688US7108771B2Method for removal of impurities in cyclic siloxanes useful as precursors for low dielectric constant thin filmsADVANCED TECH MATERIALS·Filed 2001·Granted Sep 19, 2006·24 cites·17 claims
- 1785US9997362B2Cobalt CVDENTEGRIS INC·Filed 2015·Granted Jun 12, 2018·4 cites·14 claims
- 1883US10895347B2Heat transfer to ampoule traysENTEGRIS INC·Filed 2018·Granted Jan 19, 2021·1 cites·11 claims
- 1979US6458984B1Chemical method for removal and analysis of boron impurities in tetraethylorthosilicate (TEOS)ADVANCED TECH MATERIALS·Filed 2000·Granted Oct 1, 2002·13 cites·32 claims
- 2073US12480209B2Vaporization vessel and methodENTEGRIS INC·Filed 2023·Granted Nov 25, 2025·0 cites·7 claims
- 2173US11421320B2Chemical delivery system and method of operating the chemical delivery systemENTEGRIS INC·Filed 2018·Granted Aug 23, 2022·0 cites·6 claims
- 2273US9637395B2Fluorine free tungsten ALD/CVD processENTEGRIS INC·Filed 2013·Granted May 2, 2017·1 cites·9 claims
- 2373US2014329025A1Solid precursor-based delivery of fluid utilizing controlled solids morphologyENTEGRIS INC·Filed 2014·Application pending·0 cites
- 2470US11746413B2Chemical delivery system and method of operating the chemical delivery systemENTEGRIS INC·Filed 2022·Granted Sep 5, 2023·0 cites·18 claims
- 2570US2024116774A1Tungsten precursors and related methodsENTEGRIS INC·Filed 2023·Application pending·0 cites
- 2669US12492471B2Precursor delivery systems for determining material levelsENTEGRIS INC·Filed 2022·Granted Dec 9, 2025·0 cites·11 claims
- 2768US2025382701A1Systems for on-site purification and related methodsENTEGRIS INC·Filed 2025·Application pending·0 cites
- 2867US2023287564A1Devices and method for delivering molybdenum vaporENTEGRIS INC·Filed 2023·Application pending·0 cites
- 2963US2025019822A1Metal getters in vaporizers for impurity removalENTEGRIS INC·Filed 2024·Application pending·0 cites
- 3063US2024409430A1Hafnium precursors and related methodsENTEGRIS INC·Filed 2024·Application pending·0 cites
- 3162US2023130079A1High vapor pressure delivery systemENTEGRIS INC·Filed 2022·Application pending·0 cites
- 3262US2023390680A1Filtration in a vapor delivery systemENTEGRIS INC·Filed 2023·Application pending·0 cites
- 3362US2023416913A1Modules for delivery systems and related methodsENTEGRIS INC·Filed 2023·Application pending·0 cites
- 3461US2025020282A1Diffusers in vaporizers and related methodsENTEGRIS INC·Filed 2024·Application pending·0 cites
- 3560US2025090975A1Removing impurities from precursorsENTEGRIS INC·Filed 2024·Application pending·0 cites
- 3659US11761086B2Cobalt precursorsENTEGRIS INC·Filed 2015·Granted Sep 19, 2023·0 cites·17 claims
- 3758US12334364B2Systems and methods for controlling precursor deliveryENTEGRIS INC·Filed 2023·Granted Jun 17, 2025·0 cites·10 claims
- 3858US2025230543A1Systems for delivering precursors and related methodsENTEGRIS INC·Filed 2025·Application pending·0 cites
- 3958US2006235182A1Method for removal of impurities in cyclic siloxanes useful as precursors for low dielectric constant thin filmsXU CHONGYING·Filed 2006·Application pending·0 cites
- 4058US2023112884A1Modular tray for solid chemical vaporizing chamberENTEGRIS INC·Filed 2022·Application pending·0 cites
- 4157US11821087B2Vaporization vessel and methodENTEGRIS INC·Filed 2020·Granted Nov 21, 2023·0 cites·10 claims
- 4257US2023062455A1Vaporizer assemblyENTEGRIS INC·Filed 2022·Application pending·0 cites
- 4357US2023115177A1Compressible tray for solid chemical vaporizing chamberENTEGRIS INC·Filed 2022·Application pending·0 cites
- 4451US2019186003A1Ampoule vaporizer and vesselENTEGRIS INC·Filed 2018·Application pending·0 cites
- 4550US2015218696A1Method and apparatus to help promote contact of gas with vaporized materialENTEGRIS INC·Filed 2015·Application pending·0 cites
- 4649US2021123134A1Sublimation ampoule with level sensingENTEGRIS INC·Filed 2019·Application pending·0 cites
- 4747US2024002081A1Vibration fill process for solid chemistriesENTEGRIS INC·Filed 2023·Application pending·0 cites
- 4846US8053375B1Super-dry reagent compositions for formation of ultra low k filmsADVANCED TECH MATERIALS·Filed 2007·Granted Nov 8, 2011·0 cites·25 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →