Inventor · disambiguated record
Haruo Morikawa
Also filed as: MORIKAWA HARUO
3 granted patents·1 pending application·474 citations·filing 2007–2024
71Inventor score
Technology areasH10P
Top patents by PatentIndex Score
4 records- 0196US8501599B2Substrate processing apparatus and substrate processing methodUENO MASAAKI·Filed 2007·Granted Aug 6, 2013·470 cites·19 claims
- 0275US8507296B2Substrate processing method and film forming methodUENO MASAAKI·Filed 2009·Granted Aug 13, 2013·4 cites·16 claims
- 0355US2024249960A1Substrate processing apparatus, substrate processing method, method of manufacturing semiconductor device and non-transitory computer-readable recording mediumKOKUSAI ELECTRIC CORP·Filed 2024·Application pending·0 cites
- 0437US11359283B2Reaction tube structure and substrate processing apparatusKOKUSAI ELECTRIC CORP·Filed 2017·Granted Jun 14, 2022·0 cites·18 claims
Join the waitlist — get patent alerts
Get an alert when Haruo Morikawa files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →