Assignee
UENO MASAAKI
JP·3 granted patents·496 citations·filing 2006–2009
Top patents by PatentIndex Score
3 records- 0196US8501599B2Substrate processing apparatus and substrate processing methodUENO MASAAKI·Filed 2007·Granted Aug 6, 2013·470 cites·19 claims
- 0291US8148271B2Substrate processing apparatus, coolant gas supply nozzle and semiconductor device manufacturing methodUENO MASAAKI·Filed 2006·Granted Apr 3, 2012·22 cites·20 claims
- 0375US8507296B2Substrate processing method and film forming methodUENO MASAAKI·Filed 2009·Granted Aug 13, 2013·4 cites·16 claims
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