Inventor · disambiguated record
Daniel Benz
Also filed as: BENZ DANIEL
6 granted patents·15 citations·filing 2007–2014
77Inventor score
Top patents by PatentIndex Score
6 records- 0184US8767176B2Microlithographic projection exposure apparatusBLEIDISTEL SASCHA·Filed 2011·Granted Jul 1, 2014·6 cites·30 claims
- 0282US9523922B2Illumination system of a microlithographic projection exposure apparatus having a temperature control deviceZEISS CARL SMT GMBH·Filed 2014·Granted Dec 20, 2016·3 cites·21 claims
- 0369US8797507B2Illumination system of a microlithographic projection exposure apparatus having a temperature control deviceBACH FLORIAN·Filed 2011·Granted Aug 5, 2014·2 cites·14 claims
- 0464US8241019B2Pump element and pump having such a pump elementKUECK HEINZ·Filed 2007·Granted Aug 14, 2012·3 cites·15 claims
- 0559US8717531B2Mirror for guiding a radiation bundleWALDIS SEVERIN·Filed 2010·Granted May 6, 2014·1 cites·20 claims
- 0658US9535336B2Microlithographic projection exposure apparatusZEISS CARL SMT GMBH·Filed 2014·Granted Jan 3, 2017·0 cites·22 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →