Inventor · disambiguated record
Padma Gopalakrishnan
Also filed as: GOPALAKRISHNAN PADMA
7 granted patents·2 pending applications·86 citations·filing 2005–2017
84Inventor score
Top patents by PatentIndex Score
9 records- 0192US10923379B2Methods for controlling clamping of insulator-type substrate on electrostatic-type substrate support structureLAM RES CORP·Filed 2017·Granted Feb 16, 2021·41 cites·15 claims
- 0290US8617672B2Localized surface annealing of components for substrate processing chambersBHATNAGAR ASHISH·Filed 2005·Granted Dec 31, 2013·23 cites·32 claims
- 0387US9227297B2Retaining ring with attachable segmentsAPPLIED MATERIALS INC·Filed 2014·Granted Jan 5, 2016·9 cites·21 claims
- 0481US9481608B2Surface annealing of components for substrate processing chambersAPPLIED MATERIALS INC·Filed 2013·Granted Nov 1, 2016·4 cites·20 claims
- 0576US8740206B2Life enhancement of ring assembly in semiconductor manufacturing chambersARUN SANDHYA·Filed 2011·Granted Jun 3, 2014·7 cites·16 claims
- 0666US9168631B2Two-part retaining ring with interlock featuresAPPLIED MATERIALS INC·Filed 2013·Granted Oct 27, 2015·2 cites·18 claims
- 0748US9960019B2Life enhancement of ring assembly in semiconductor manufacturing chambersAPPLIED MATERIALS INC·Filed 2014·Granted May 1, 2018·0 cites·19 claims
- 0842US2013035022A1Two-Part Plastic Retaining RingPAIK YOUNG J·Filed 2012·Application pending·0 cites
- 0933US2012154974A1High efficiency electrostatic chuck assembly for semiconductor wafer processingBHATNAGAR ASHISH·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →