Inventor · disambiguated record
Michael S. Jackson
Also filed as: JACKSON MICHAEL · JACKSON MICHAEL S · JACKSON MICHAEL STERLING
20 granted patents·7 pending applications·515 citations·filing 1998–2024
94Inventor score
Top patents by PatentIndex Score
27 records- 0196US8291857B2Apparatuses and methods for atomic layer depositionLAM HYMAN·Filed 2009·Granted Oct 23, 2012·375 cites·16 claims
- 0295US8293015B2Apparatuses and methods for atomic layer depositionLAM HYMAN W H·Filed 2011·Granted Oct 23, 2012·21 cites·4 claims
- 0390US11586160B2Reducing substrate surface scratching using machine learningAPPLIED MATERIALS INC·Filed 2021·Granted Feb 21, 2023·2 cites·20 claims
- 0487US8747556B2Apparatuses and methods for atomic layer depositionLAM HYMAN W H·Filed 2012·Granted Jun 10, 2014·3 cites·15 claims
- 0587US7705275B2Substrate support having brazed plates and resistance heaterAPPLIED MATERIALS INC·Filed 2006·Granted Apr 27, 2010·25 cites·13 claims
- 0682US6057244AMethod for improved sputter etch processingAPPLIED MATERIALS INC·Filed 1998·Granted May 2, 2000·68 cites·21 claims
- 0780US9017776B2Apparatuses and methods for atomic layer depositionAPPLIED MATERIALS INC·Filed 2012·Granted Apr 28, 2015·1 cites·6 claims
- 0877US10643840B2Selective deposition defects removal by chemical etchAPPLIED MATERIALS INC·Filed 2018·Granted May 5, 2020·2 cites·20 claims
- 0974US10950433B2Methods for enhancing selectivity in SAM-based selective depositionAPPLIED MATERIALS INC·Filed 2018·Granted Mar 16, 2021·1 cites·11 claims
- 1073US11835927B2Reducing substrate surface scratching using machine learningAPPLIED MATERIALS INC·Filed 2022·Granted Dec 5, 2023·0 cites·20 claims
- 1172US10770292B2Wafer treatment for achieving defect-free self-assembled monolayersAPPLIED MATERIALS INC·Filed 2018·Granted Sep 8, 2020·1 cites·27 claims
- 1271US6375753B1Method and apparatus for removing processing liquid from a processing liquid delivery lineAPPLIED MATERIALS INC·Filed 2001·Granted Apr 23, 2002·9 cites·19 claims
- 1367US9275865B2Plasma treatment of film for impurity removalAPPLIED MATERIALS INC·Filed 2013·Granted Mar 1, 2016·2 cites·18 claims
- 1465US11735420B2Wafer treatment for achieving defect-free self-assembled monolayersAPPLIED MATERIALS INC·Filed 2020·Granted Aug 22, 2023·0 cites·20 claims
- 1565US11515155B2Methods for enhancing selectivity in SAM-based selective depositionAPPLIED MATERIALS INC·Filed 2021·Granted Nov 29, 2022·0 cites·9 claims
- 1663USD1071886SSubstrate support for a substrate processing chamberAPPLIED MATERIALS INC·Filed 2022·Granted Apr 22, 2025·3 cites·1 claims
- 1761US2021283650A1Methods and Apparatus for Cryogenic Gas Stream Assisted SAM-based Selective DepositionAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
- 1859US2024379343A1Mitigation of first wafer effectAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1958US11033930B2Methods and apparatus for cryogenic gas stream assisted SAM-based selective depositionAPPLIED MATERIALS INC·Filed 2019·Granted Jun 15, 2021·0 cites·11 claims
- 2054US2024304495A1Hydrogen plasma treatment for forming logic devicesAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 2150US2012237693A1In-situ clean process for metal deposition chambersJACKSON MICHAEL·Filed 2012·Application pending·0 cites
- 2248US2024404830A1Seam free titanium nitride gapfillAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 2344US10593521B2Substrate support for plasma etch operationsAPPLIED MATERIALS INC·Filed 2013·Granted Mar 17, 2020·0 cites·19 claims
- 2442US2019326114A1Methods of treating a substrate to form a layer thereon for application in selective deposition processesAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 2540US8637410B2Method for metal deposition using hydrogen plasmaSUBRAMANI ANANTHA K·Filed 2011·Granted Jan 28, 2014·0 cites·16 claims
- 2636US2012258280A1Extended life textured chamber components and method for fabricating sameJACKSON MICHAEL·Filed 2012·Application pending·0 cites
- 2733US6305392B1Method and apparatus for removing processing liquid from a processing liquid delivery lineAPPLIED MATERIALS INC·Filed 1999·Granted Oct 23, 2001·2 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →