Inventor · disambiguated record
Vladimir A. Ukraintsev
Also filed as: UKRAINTSEV VLADIMIR · UKRAINTSEV VLADIMIR A · UKRAINTSEV VLADIMIR ALEXEEVICH
13 granted patents·6 pending applications·45 citations·filing 2002–2016
89Inventor score
Files withDCG SYSTEMS INC6TEXAS INSTRUMENTS INC5UKRAINTSEV VLADIMIR ALEXEEVICH3ROGERS DUNCAN M2FEI CO1
Top patents by PatentIndex Score
19 records- 0192US9891280B2Probe-based data collection system with adaptive mode of probing controlled by local sample propertiesFEI EFA INC·Filed 2016·Granted Feb 13, 2018·7 cites·13 claims
- 0286US8895923B2System and method for non-contact microscopy for three-dimensional pre-characterization of a sample for fast and non-destructive on sample navigation during nanoprobingDCG SYSTEMS INC·Filed 2013·Granted Nov 25, 2014·7 cites·20 claims
- 0385US10539589B2Through process flow intra-chip and inter-chip electrical analysis and process control using in-line nanoprobingDCG SYSTEMS INC·Filed 2015·Granted Jan 21, 2020·7 cites·23 claims
- 0485US9057740B1Probe-based data collection system with adaptive mode of probingDCG SYSTEMS INC·Filed 2013·Granted Jun 16, 2015·7 cites·20 claims
- 0575US10175295B2Optical nanoprobing of integrated circuitsFEI CO·Filed 2016·Granted Jan 8, 2019·4 cites·33 claims
- 0672US9506947B2System and method for non-contact microscopy for three-dimensional pre-characterization of a sample for fast and non-destructive on sample navigation during nanoprobingDCG SYSTEMS INC·Filed 2014·Granted Nov 29, 2016·2 cites·18 claims
- 0761US6967349B2Method for fabricating a multi-level integrated circuit having scatterometry test structures stacked over same footprint areaTEXAS INSTRUMENTS INC·Filed 2002·Granted Nov 22, 2005·6 cites·4 claims
- 0858US7797991B2Rocking Y-shaped probe for critical dimension atomic force microscopyTEXAS INSTRUMENTS INC·Filed 2007·Granted Sep 21, 2010·2 cites·20 claims
- 0954US7921465B2Nanotip repair and characterization using field ion microscopyTEXAS INSTRUMENTS INC·Filed 2008·Granted Apr 5, 2011·0 cites·20 claims
- 1049US2014380531A1Probe-based data collection system with adaptive mode of probing controlled by local sample propertiesDCG SYSTEMS INC·Filed 2014·Application pending·0 cites
- 1147US9347897B2Characterizing dimensions of structures via scanning probe microscopyROGERS DUNCAN M·Filed 2006·Granted May 24, 2016·0 cites·21 claims
- 1247US7381950B2Characterizing dimensions of structures via scanning probe microscopyTEXAS INSTRUMENTS INC·Filed 2004·Granted Jun 3, 2008·3 cites·9 claims
- 1347US2012137396A1Characterizing Dimensions of Structures Via Scanning Probe MicroscopyROGERS DUNCAN M·Filed 2012·Application pending·0 cites
- 1442US2009262335A1Holographic scatterometerUKRAINTSEV VLADIMIR ALEXEEVICH·Filed 2008·Application pending·0 cites
- 1539US2006292885A1Layout modification to eliminate line bending caused by line material shrinkageTEXAS INSTRUMENTS INC·Filed 2005·Application pending·0 cites
- 1638US8305097B2Method for calibrating an inspection toolUKRAINTSEV VLADIMIR A·Filed 2007·Granted Nov 6, 2012·0 cites·20 claims
- 1737US2009053834A1Use of scatterometry for in-line detection of poly-si strings left in sti divot after gate etchUKRAINTSEV VLADIMIR ALEXEEVICH·Filed 2007·Application pending·0 cites
- 1835US2016370425A1Particle Beam Heating to Identify DefectsDCG SYSTEMS INC·Filed 2016·Application pending·0 cites
- 1934US9006001B2Simple scatterometry structure for Si recess etch controlUKRAINTSEV VLADIMIR ALEXEEVICH·Filed 2008·Granted Apr 14, 2015·0 cites·20 claims
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