Assignee
UKRAINTSEV VLADIMIR ALEXEEVICH
US·1 granted patent·2 pending applications·0 citations·filing 2007–2008
Top patents by PatentIndex Score
3 records- 0142US2009262335A1Holographic scatterometerUKRAINTSEV VLADIMIR ALEXEEVICH·Filed 2008·Application pending·0 cites
- 0237US2009053834A1Use of scatterometry for in-line detection of poly-si strings left in sti divot after gate etchUKRAINTSEV VLADIMIR ALEXEEVICH·Filed 2007·Application pending·0 cites
- 0334US9006001B2Simple scatterometry structure for Si recess etch controlUKRAINTSEV VLADIMIR ALEXEEVICH·Filed 2008·Granted Apr 14, 2015·0 cites·20 claims
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