Inventor · disambiguated record
Chunshi Cui
Also filed as: CUI CHUNSHI
6 granted patents·417 citations·filing 1996–2001
87Inventor score
Files withAPPLIED MATERIALS INC5
Top patents by PatentIndex Score
6 records- 0194US6797189B2Enhancement of silicon oxide etch rate and nitride selectivity using hexafluorobutadiene or other heavy perfluorocarbonFiled 1999·Granted Sep 28, 2004·217 cites·29 claims
- 0287US6652712B2Inductive antenna for a plasma reactor producing reduced fluorine dissociationAPPLIED MATERIALS INC·Filed 2001·Granted Nov 25, 2003·29 cites·12 claims
- 0385US6667577B2Plasma reactor with spoke antenna having a VHF mode with the spokes in phaseAPPLIED MATERIALS INC·Filed 2001·Granted Dec 23, 2003·28 cites·59 claims
- 0485US6238588B1High pressure high non-reactive diluent gas content high plasma ion density plasma oxide etch processAPPLIED MATERIALS INC·Filed 1996·Granted May 29, 2001·84 cites·24 claims
- 0574US5965463ASilane etching processAPPLIED MATERIALS INC·Filed 1997·Granted Oct 12, 1999·44 cites·26 claims
- 0647US6544429B1Enhancement of silicon oxide etch rate and substrate selectivity with xenon additionAPPLIED MATERIALS INC·Filed 1999·Granted Apr 8, 2003·15 cites·34 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →