Inventor · disambiguated record
Junji Oikawa
Also filed as: OIKAWA JUNJI
4 granted patents·3 pending applications·12 citations·filing 2009–2016
69Inventor score
Technology areasH10P
Top patents by PatentIndex Score
7 records- 0183US9385015B2Transfer chamber and method for preventing adhesion of particleYAMAWAKU JUN·Filed 2010·Granted Jul 5, 2016·6 cites·4 claims
- 0276US8398745B2Substrate processing apparatus and exhaust method thereforYAMAWAKU JUN·Filed 2010·Granted Mar 19, 2013·4 cites·12 claims
- 0368US10115614B2Transfer chamber and method for preventing adhesion of particleTOKYO ELECTRON LTD·Filed 2016·Granted Oct 30, 2018·1 cites·5 claims
- 0461US8409328B2Substrate transfer device and substrate transfer methodYAMAWAKU JUN·Filed 2010·Granted Apr 2, 2013·1 cites·18 claims
- 0546US2011090612A1Atmosphere cleaning deviceTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 0635US2010214712A1Method for charge-neutralizing target substrate and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2010·Application pending·0 cites
- 0728US2012204576A1Cooling unit, processing chamber, part in the processing chamber, and cooling methodMATSUZAKI KAZUYOSHI·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →