Inventor · disambiguated record
Philip Allan Kraus
Also filed as: KRAUS PHILIP · KRAUS PHILIP A · KRAUS PHILIP ALLAN
114 granted patents·35 pending applications·840 citations·filing 2002–2024
99Inventor score
Files withAPPLIED MATERIALS INC122INTERMOLECULAR INC11KRAUS PHILIP A6ACHUTHARAMAN VEDAPURAM S1CHUA THAI CHENG1
Top patents by PatentIndex Score
149 records- 0199US10312048B2Creating ion energy distribution functions (IEDF)APPLIED MATERIALS INC·Filed 2017·Granted Jun 4, 2019·48 cites·19 claims
- 0298US11728124B2Creating ion energy distribution functions (IEDF)APPLIED MATERIALS INC·Filed 2021·Granted Aug 15, 2023·5 cites·13 claims
- 0398US11404248B2Modular microwave plasma sourceAPPLIED MATERIALS INC·Filed 2020·Granted Aug 2, 2022·4 cites·7 claims
- 0498US11069504B2Creating ion energy distribution functions (IEDF)APPLIED MATERIALS INC·Filed 2020·Granted Jul 20, 2021·7 cites·21 claims
- 0598US10763150B2System for coupling a voltage to spatially segmented portions of the wafer with variable voltageAPPLIED MATERIALS INC·Filed 2017·Granted Sep 1, 2020·42 cites·20 claims
- 0698US10685807B2Creating ion energy distribution functions (IEDF)APPLIED MATERIALS INC·Filed 2019·Granted Jun 16, 2020·38 cites·16 claims
- 0798US10510575B2Substrate support with multiple embedded electrodesAPPLIED MATERIALS INC·Filed 2017·Granted Dec 17, 2019·64 cites·17 claims
- 0897US11670489B2Modular microwave source with embedded ground surfaceAPPLIED MATERIALS INC·Filed 2021·Granted Jun 6, 2023·4 cites·10 claims
- 0997US10923320B2System for tunable workpiece biasing in a plasma reactorAPPLIED MATERIALS INC·Filed 2019·Granted Feb 16, 2021·33 cites·20 claims
- 1097US10373804B2System for tunable workpiece biasing in a plasma reactorAPPLIED MATERIALS INC·Filed 2017·Granted Aug 6, 2019·87 cites·18 claims
- 1196US11589474B2Diagnostic disc with a high vacuum and temperature tolerant power sourceAPPLIED MATERIALS INC·Filed 2020·Granted Feb 21, 2023·6 cites·17 claims
- 1296US10904996B2Substrate support with electrically floating power supplyAPPLIED MATERIALS INC·Filed 2017·Granted Jan 26, 2021·43 cites·19 claims
- 1396US10811296B2Substrate support with dual embedded electrodesAPPLIED MATERIALS INC·Filed 2017·Granted Oct 20, 2020·43 cites·15 claims
- 1496US10714372B2System for coupling a voltage to portions of a substrateAPPLIED MATERIALS INC·Filed 2017·Granted Jul 14, 2020·44 cites·20 claims
- 1595US11049694B2Modular microwave source with embedded ground surfaceAPPLIED MATERIALS INC·Filed 2019·Granted Jun 29, 2021·12 cites·20 claims
- 1695US9725302B1Wafer processing equipment having exposable sensing layersAPPLIED MATERIALS INC·Filed 2016·Granted Aug 8, 2017·18 cites·20 claims
- 1794US8143147B1Methods and systems for forming thin filmsKRAUS PHILIP A·Filed 2011·Granted Mar 27, 2012·16 cites·20 claims
- 1893US12198966B2Substrate support with multiple embedded electrodesAPPLIED MATERIALS INC·Filed 2021·Granted Jan 14, 2025·2 cites·15 claims
- 1993US9975758B2Wafer processing equipment having exposable sensing layersAPPLIED MATERIALS INC·Filed 2017·Granted May 22, 2018·8 cites·20 claims
- 2092US12368024B2Methods and apparatus for processing a substrateAPPLIED MATERIALS INC·Filed 2021·Granted Jul 22, 2025·2 cites·17 claims
- 2192US11289312B2Physical vapor deposition (PVD) chamber with in situ chamber cleaning capabilityAPPLIED MATERIALS INC·Filed 2019·Granted Mar 29, 2022·4 cites·18 claims
- 2292US10607817B2Thermal repeatability and in-situ showerhead temperature monitoringAPPLIED MATERIALS INC·Filed 2017·Granted Mar 31, 2020·7 cites·20 claims
- 2392US7514373B2Method and apparatus for plasma nitridation of gate dielectrics using amplitude modulated radio-frequency energyAPPLIED MATERIALS INC·Filed 2006·Granted Apr 7, 2009·16 cites·33 claims
- 2492US7179754B2Method and apparatus for plasma nitridation of gate dielectrics using amplitude modulated radio-frequency energyAPPLIED MATERIALS INC·Filed 2004·Granted Feb 20, 2007·51 cites·21 claims
- 2591US11626281B2PEALD nitride filmsAPPLIED MATERIALS INC·Filed 2020·Granted Apr 11, 2023·2 cites·18 claims
- 2690US10879042B2Symmetric plasma source to generate pie shaped treatmentAPPLIED MATERIALS INC·Filed 2017·Granted Dec 29, 2020·5 cites·16 claims
- 2789US11562909B2Directional selective junction clean with field polymer protectionsAPPLIED MATERIALS INC·Filed 2020·Granted Jan 24, 2023·2 cites·8 claims
- 2889US11508558B2Thermal repeatability and in-situ showerhead temperature monitoringAPPLIED MATERIALS INC·Filed 2020·Granted Nov 22, 2022·2 cites·18 claims
- 2989US11284018B1Smart camera substrateAPPLIED MATERIALS INC·Filed 2020·Granted Mar 22, 2022·2 cites·18 claims
- 3089US6660659B1Plasma method and apparatus for processing a substrateAPPLIED MATERIALS INC·Filed 2002·Granted Dec 9, 2003·44 cites·20 claims
- 3188US11037764B2Modular microwave source with local Lorentz forceAPPLIED MATERIALS INC·Filed 2017·Granted Jun 15, 2021·4 cites·14 claims
- 3288US6831021B2Plasma method and apparatus for processing a substrateAPPLIED MATERIALS INC·Filed 2003·Granted Dec 14, 2004·54 cites·7 claims
- 3386US11081317B2Modular high-frequency sourceAPPLIED MATERIALS INC·Filed 2018·Granted Aug 3, 2021·3 cites·19 claims
- 3485US12432461B2Smart camera substrateAPPLIED MATERIALS INC·Filed 2024·Granted Sep 30, 2025·0 cites·20 claims
- 3585US12009236B2Sensors and system for in-situ edge ring erosion monitorAPPLIED MATERIALS INC·Filed 2019·Granted Jun 11, 2024·3 cites·7 claims
- 3685US10943768B2Modular high-frequency source with integrated gas distributionAPPLIED MATERIALS INC·Filed 2018·Granted Mar 9, 2021·3 cites·9 claims
- 3785US10937678B2Substrate support with multiple embedded electrodesAPPLIED MATERIALS INC·Filed 2019·Granted Mar 2, 2021·2 cites·17 claims
- 3885US10903056B2Plasma source for rotating susceptorAPPLIED MATERIALS INC·Filed 2018·Granted Jan 26, 2021·3 cites·19 claims
- 3985US10720311B2Phased array modular high-frequency sourceAPPLIED MATERIALS INC·Filed 2019·Granted Jul 21, 2020·2 cites·20 claims
- 4085US8652861B1HPC optimization of contacts to optoelectronic devicesINTERMOLECULAR INC·Filed 2012·Granted Feb 18, 2014·4 cites·19 claims
- 4185US8318590B2Methods and systems for forming thin filmsKRAUS PHILIP A·Filed 2012·Granted Nov 27, 2012·5 cites·16 claims
- 4284US11114282B2Phased array modular high-frequency sourceAPPLIED MATERIALS INC·Filed 2020·Granted Sep 7, 2021·1 cites·20 claims
- 4384US10504699B2Phased array modular high-frequency sourceAPPLIED MATERIALS INC·Filed 2018·Granted Dec 10, 2019·3 cites·20 claims
- 4484US9978621B1Selective etch rate monitorKRAUS PHILIP ALLAN·Filed 2016·Granted May 22, 2018·4 cites·20 claims
- 4584US8524581B2GaN epitaxy with migration enhancement and surface energy modificationKRAUS PHILIP A·Filed 2011·Granted Sep 3, 2013·7 cites·19 claims
- 4683US11393661B2Remote modular high-frequency sourceAPPLIED MATERIALS INC·Filed 2018·Granted Jul 19, 2022·3 cites·15 claims
- 4783US10707058B2Symmetric and irregular shaped plasmas using modular microwave sourcesAPPLIED MATERIALS INC·Filed 2017·Granted Jul 7, 2020·3 cites·16 claims
- 4882US12216015B2MEMS resonator sensor substrate for plasma, temperature, stress, or deposition sensingAPPLIED MATERIALS INC·Filed 2023·Granted Feb 4, 2025·0 cites·13 claims
- 4982US12191118B2Monolithic modular microwave source with integrated process gas distributionAPPLIED MATERIALS INC·Filed 2024·Granted Jan 7, 2025·0 cites·20 claims
- 5082US11881384B2Monolithic modular microwave source with integrated process gas distributionAPPLIED MATERIALS INC·Filed 2019·Granted Jan 23, 2024·2 cites·19 claims
Showing the top 50 of 149 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →