Inventor · disambiguated record
Zhigang Mao
Also filed as: MAO ZHIGANG
3 granted patents·2 pending applications·3 citations·filing 2004–2016
54Inventor score
Top patents by PatentIndex Score
5 records- 0153US9425062B2Method for improving CD micro-loading in photomask plasma etchingAPPLIED MATERIALS INC·Filed 2014·Granted Aug 23, 2016·0 cites·8 claims
- 0250US10199224B2Method for improving CD micro-loading in photomask plasma etchingAPPLIED MATERIALS INC·Filed 2016·Granted Feb 5, 2019·0 cites·7 claims
- 0347US7208420B1Method for selectively etching an aluminum containing layerLAM RES CORP·Filed 2004·Granted Apr 24, 2007·3 cites·20 claims
- 0442US2009325387A1Methods and apparatus for in-situ chamber dry clean during photomask plasma etchingAPPLIED MATERIALS INC·Filed 2008·Application pending·0 cites
- 0536US2013048606A1Methods for in-situ chamber dry clean in photomask plasma etching processing chamberMAO ZHIGANG·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →