Inventor · disambiguated record
Sascha Migura
Also filed as: MIGURA SASCHA
8 granted patents·2 pending applications·15 citations·filing 2010–2015
77Inventor score
Top patents by PatentIndex Score
10 records- 0193US8279404B2Projection objective having mirror elements with reflective coatingsCHAN DANNY·Filed 2010·Granted Oct 2, 2012·12 cites·19 claims
- 0267US9013678B2Projection objective having mirror elements with reflective coatingsCHAN DANNY·Filed 2012·Granted Apr 21, 2015·2 cites·27 claims
- 0362US8486590B2Reflective mask for EUV lithographyKAMENOV VLADIMIR·Filed 2012·Granted Jul 16, 2013·1 cites·29 claims
- 0451US9291751B2Imaging optical unit and projection exposure apparatus for projection lithography comprising such an imaging optical unitZEISS CARL SMT GMBH·Filed 2013·Granted Mar 22, 2016·0 cites·20 claims
- 0542US9188771B2Reflective optical imaging systemDODOC AURELIAN·Filed 2011·Granted Nov 17, 2015·0 cites·28 claims
- 0641US2012134015A1Mirror for euv wavelengths, projection objective for microlithography having such mirror and projection exposure apparatus having such projection objectivePAUL HANS-JOCHEN·Filed 2011·Application pending·0 cites
- 0739US2012212810A1Mirror for the euv wavelength range, projection objective for microlithography cromprising such a mirror, and projection exposure apparatus for microlithography comprising such a projection objectivePAUL HANS-JOCHEN·Filed 2012·Application pending·0 cites
- 0837US9494718B2Mirror for the EUV wavelength range, substrate for such a mirror, projection objective for microlithography comprising such a mirror or such a substrate, and projection exposure apparatus for microlithography comprising such a projection objectiveMUELLENDER STEPHAN·Filed 2012·Granted Nov 15, 2016·0 cites·27 claims
- 0936US10558126B2Lithographic apparatus and methodASML NETHERLANDS BV·Filed 2015·Granted Feb 11, 2020·0 cites·28 claims
- 1033US9568845B2Mirror for use in a microlithography projection exposure apparatusROCKTAESCHEL MARTIN·Filed 2012·Granted Feb 14, 2017·0 cites·6 claims
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