Assignee
DODOC AURELIAN
DE·9 granted patents·26 citations·filing 2005–2012
Top patents by PatentIndex Score
9 records- 0195US8107162B2Catadioptric projection objective with intermediate imagesDODOC AURELIAN·Filed 2005·Granted Jan 31, 2012·18 cites·42 claims
- 0273US8773638B2Microlithographic projection exposure apparatus with correction optical system that heats projection objective elementDODOC AURELIAN·Filed 2010·Granted Jul 8, 2014·2 cites·23 claims
- 0372US8858099B2Anamorphic objectiveDODOC AURELIAN·Filed 2012·Granted Oct 14, 2014·4 cites·24 claims
- 0464US8212991B2Optical system of a microlithographic projection exposure apparatusDODOC AURELIAN·Filed 2009·Granted Jul 3, 2012·2 cites·33 claims
- 0559US9019596B2Catadioptric projection objective with intermediate imagesDODOC AURELIAN·Filed 2012·Granted Apr 28, 2015·0 cites·20 claims
- 0653US8780441B2Catadioptric projection objective with pupil correctionDODOC AURELIAN·Filed 2011·Granted Jul 15, 2014·0 cites·17 claims
- 0745US9036772B2Mirror for the EUV wavelength range, projection objective for microlithography comprising such a mirror, and projection exposure apparatus for microlithography comprising such a projection objectiveDODOC AURELIAN·Filed 2010·Granted May 19, 2015·0 cites·11 claims
- 0843US8064040B2Projection objective, projection exposure apparatus and reflective reticle for microlithographyDODOC AURELIAN·Filed 2005·Granted Nov 22, 2011·0 cites·34 claims
- 0942US9188771B2Reflective optical imaging systemDODOC AURELIAN·Filed 2011·Granted Nov 17, 2015·0 cites·28 claims
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