Assignee
KAMENOV VLADIMIR
DE·2 granted patents·1 pending application·1 citations·filing 2006–2012
Top patents by PatentIndex Score
3 records- 0162US8486590B2Reflective mask for EUV lithographyKAMENOV VLADIMIR·Filed 2012·Granted Jul 16, 2013·1 cites·29 claims
- 0245US9733395B2Microlithographic projection exposure apparatusKAMENOV VLADIMIR·Filed 2011·Granted Aug 15, 2017·0 cites·29 claims
- 0337US2006238735A1Optical system of a projection exposure apparatusKAMENOV VLADIMIR·Filed 2006·Application pending·0 cites
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