Inventor · disambiguated record
Brian Ahr
Also filed as: AHR BRIAN · AHR BRIAN E
9 granted patents·15 citations·filing 2014–2022
80Inventor score
Top patents by PatentIndex Score
9 records- 0192US9544984B2System and method for generation of extreme ultraviolet lightKLA TENCOR CORP·Filed 2014·Granted Jan 10, 2017·10 cites·25 claims
- 0290US10021773B2Laser produced plasma light source having a target material coated on a cylindrically-symmetric elementKLA TENCOR CORP·Filed 2016·Granted Jul 10, 2018·4 cites·10 claims
- 0368US10880979B2Droplet generation for a laser produced plasma light sourceKLA TENCOR CORP·Filed 2016·Granted Dec 29, 2020·1 cites·14 claims
- 0467US11419202B2Laser produced plasma light source having a target material coated on a cylindrically-symmetric elementKLA CORP·Filed 2021·Granted Aug 16, 2022·0 cites·18 claims
- 0567US11343899B2Droplet generation for a laser produced plasma light sourceKLA CORP·Filed 2020·Granted May 24, 2022·0 cites·19 claims
- 0659US10893599B2Laser produced plasma light source having a target material coated on a cylindrically-symmetric elementKLA TENCOR CORP·Filed 2018·Granted Jan 12, 2021·0 cites·9 claims
- 0751US12418972B2Confocal chromatic metrology for EUV source condition monitoringKLA CORP·Filed 2022·Granted Sep 16, 2025·0 cites·22 claims
- 0841US11635700B2Method and apparatus for EUV mask inspectionKLA CORP·Filed 2021·Granted Apr 25, 2023·0 cites·19 claims
- 0932US10261911B2Apparatus and method for computational workflow managementUNIV JOHNS HOPKINS·Filed 2017·Granted Apr 16, 2019·0 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →