Inventor · disambiguated record
Diane K. Stewart
Also filed as: STEWART DIANE · STEWART DIANE K
7 granted patents·1 pending application·120 citations·filing 2003–2019
85Inventor score
Top patents by PatentIndex Score
8 records- 0188US6979822B1Charged particle beam systemFEI CO·Filed 2004·Granted Dec 27, 2005·48 cites·26 claims
- 0286US7662524B2Photolithography mask repairFEI CO·Filed 2008·Granted Feb 16, 2010·14 cites·14 claims
- 0385US7544938B1Methods and apparatus for statistical characterization of nano-particlesFEI CO·Filed 2006·Granted Jun 9, 2009·13 cites·27 claims
- 0484US7504182B2Photolithography mask repairFEI CO·Filed 2003·Granted Mar 17, 2009·35 cites·14 claims
- 0566US7727681B2Electron beam processing for mask repairFEI CO·Filed 2004·Granted Jun 1, 2010·9 cites·14 claims
- 0664US10410828B2Charged particle beam system and methodsCARL ZEISS MICROSCOPY LLC·Filed 2015·Granted Sep 10, 2019·1 cites·22 claims
- 0753US2019189392A1Charged particle beam system and methodsCARL ZEISS MICROSCOPY LLC·Filed 2019·Application pending·0 cites
- 0849US8119985B2Methods and apparatus for statistical characterization of nano-particlesSTEWART DIANE K·Filed 2009·Granted Feb 21, 2012·0 cites·21 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →