Inventor · disambiguated record
Timo Hatanpää
Also filed as: HATANPAA TIMO · HATANPAEAE TIMO · HATANPÄÄ TIMO
46 granted patents·12 pending applications·486 citations·filing 1999–2025
98Inventor score
Top patents by PatentIndex Score
58 records- 0198US10731249B2Method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction chamber, and related vapor deposition apparatusASM IP HOLDING BV·Filed 2018·Granted Aug 4, 2020·286 cites·24 claims
- 0297US11390946B2Methods of forming a transition metal containing film on a substrate by a cyclical deposition processASM IP HOLDING BV·Filed 2020·Granted Jul 19, 2022·4 cites·20 claims
- 0397US10358407B2Synthesis and use of precursors for vapor deposition of tungsten containing thin filmsASM IP HOLDING BV·Filed 2017·Granted Jul 23, 2019·13 cites·10 claims
- 0496US12209305B2Deposition of transition metal—comprising materialASM IP HOLDING BV·Filed 2022·Granted Jan 28, 2025·2 cites·20 claims
- 0596US11814400B2Synthesis and use of precursors for ALD of tellurium and selenium thin filmsASM INT NV·Filed 2021·Granted Nov 14, 2023·2 cites·19 claims
- 0696US11014866B2Synthesis and use of precursors for vapor deposition of tungsten containing thin filmsASM IP HOLDING BV·Filed 2019·Granted May 25, 2021·8 cites·20 claims
- 0795US11667595B2Synthesis and use of precursors for vapor deposition of tungsten containing thin filmsASM IP HOLDING BV·Filed 2021·Granted Jun 6, 2023·2 cites·7 claims
- 0894US12065739B2Vapor deposition processesASM IP HOLDING BV·Filed 2022·Granted Aug 20, 2024·2 cites·20 claims
- 0994US11499222B2Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing materialASM IP HOLDING BV·Filed 2019·Granted Nov 15, 2022·4 cites·19 claims
- 1094US11047042B2Synthesis and use of precursors for ALD of molybdenum or tungsten containing thin filmsASM IP HOLDING BV·Filed 2016·Granted Jun 29, 2021·12 cites·18 claims
- 1194US9315896B2Synthesis and use of precursors for ALD of group VA element containing thin filmsPORE VILJAMI·Filed 2010·Granted Apr 19, 2016·16 cites·26 claims
- 1293US11492703B2Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing materialASM IP HOLDING BV·Filed 2019·Granted Nov 8, 2022·4 cites·18 claims
- 1393US10208379B2Synthesis and use of precursors for ALD of group VA element containing thin filmsASM IP HOLDING BV·Filed 2017·Granted Feb 19, 2019·5 cites·13 claims
- 1493US10145009B2Vapor deposition of thin films comprising goldASM IP HOLDING BV·Filed 2017·Granted Dec 4, 2018·4 cites·25 claims
- 1593US9677173B2Precursors and methods for atomic layer deposition of transition metal oxidesASM INT NV·Filed 2016·Granted Jun 13, 2017·3 cites·23 claims
- 1691US10308673B2Synthesis and use of precursors for ALD of tellurium and selenium thin filmsASM INT NV·Filed 2017·Granted Jun 4, 2019·4 cites·20 claims
- 1790US9783563B2Synthesis and use of precursors for ALD of tellurium and selenium thin filmsASM INT NV·Filed 2015·Granted Oct 10, 2017·4 cites·20 claims
- 1888US2025389020A1Method and system for depositing noble metal-containing layerASM IP HOLDING BV·Filed 2025·Application pending·0 cites
- 1987US12442076B2Method and system for depositing noble metal-containing layerASM IP HOLDING BV·Filed 2024·Granted Oct 14, 2025·0 cites·26 claims
- 2087US10344378B2Precursors and methods for atomic layer deposition of transition metal oxidesASM INT NV·Filed 2017·Granted Jul 9, 2019·1 cites·20 claims
- 2187US9175390B2Synthesis and use of precursors for ALD of tellurium and selenium thin filmsPORE VILJAMI·Filed 2009·Granted Nov 3, 2015·8 cites·42 claims
- 2286US11624112B2Synthesis and use of precursors for ALD of molybdenum or tungsten containing thin filmsASM IP HOLDING BV·Filed 2021·Granted Apr 11, 2023·1 cites·20 claims
- 2386US11072622B2Synthesis and use of precursors for ALD of tellurium and selenium thin filmsASM INT NV·Filed 2019·Granted Jul 27, 2021·2 cites·10 claims
- 2486US11047046B2Vapor deposition of thin films comprising goldASM IP HOLDING BV·Filed 2018·Granted Jun 29, 2021·1 cites·20 claims
- 2586US7108747B1Method for growing oxide thin films containing barium and strontiumASM INT·Filed 1999·Granted Sep 19, 2006·79 cites·39 claims
- 2686US2025305117A1Synthesis and use of precursors for ald of molybdenum or tungsten containing thin filmsASM IP HOLDING BV·Filed 2025·Application pending·0 cites
- 2785US10941487B2Synthesis and use of precursors for ALD of group VA element containing thin filmsASM IP HOLDING BV·Filed 2020·Granted Mar 9, 2021·1 cites·24 claims
- 2885US9828674B2Synthesis and use of precursors for ALD of group VA element containing thin filmsASM IP HOLDING BV·Filed 2016·Granted Nov 28, 2017·2 cites·21 claims
- 2985US2025122612A1Deposition of transition metal-comprising materialASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 3083US2023093384A1Synthesis and use of precursors for ald of group va element containing thin filmsASM IP HOLDING BV·Filed 2022·Application pending·0 cites
- 3183US2024417852A1Vapor deposition processesASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 3282US12365981B2Synthesis and use of precursors for ALD of molybdenum or tungsten containing thin filmsASM IP HOLDING BV·Filed 2023·Granted Jul 22, 2025·0 cites·6 claims
- 3382US11952658B2Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing materialASM IP HOLDING BV·Filed 2022·Granted Apr 9, 2024·0 cites·20 claims
- 3482US2023175132A1Vapor deposition of thin films comprising goldASM IP HOLDING BV·Filed 2022·Application pending·0 cites
- 3581US11959171B2Methods of forming a transition metal containing film on a substrate by a cyclical deposition processASM IP HOLDING BV·Filed 2022·Granted Apr 16, 2024·0 cites·20 claims
- 3681US9365926B2Precursors and methods for atomic layer deposition of transition metal oxidesASM INT·Filed 2015·Granted Jun 14, 2016·1 cites·23 claims
- 3779US12104250B2Vapor deposition processesASM IP HOLDING BV·Filed 2022·Granted Oct 1, 2024·0 cites·19 claims
- 3879US11555242B2Precursors and methods for atomic layer deposition of transition metal oxidesASM INT NV·Filed 2019·Granted Jan 17, 2023·0 cites·12 claims
- 3978US11499227B2Vapor deposition of thin films comprising goldASM IP HOLDING BV·Filed 2021·Granted Nov 15, 2022·0 cites·20 claims
- 4078US8372483B2Methods for forming thin films comprising telluriumASM INT·Filed 2008·Granted Feb 12, 2013·2 cites·27 claims
- 4177US11542600B2Synthesis and use of precursors for ALD of group VA element containing thin filmsASM IP HOLDING BV·Filed 2021·Granted Jan 3, 2023·0 cites·20 claims
- 4275US9169557B2Process for producing oxide filmsHATANPAA TIMO·Filed 2010·Granted Oct 27, 2015·4 cites·16 claims
- 4374US2024368763A1Vapor Deposition ProcessesASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 4473US12509765B2Method and system for depositing transition metal carbideASM IP HOLDING BV·Filed 2024·Granted Dec 30, 2025·0 cites·24 claims
- 4573US11814715B2Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing materialASM IP HOLDING BV·Filed 2022·Granted Nov 14, 2023·0 cites·18 claims
- 4672US7713584B2Process for producing oxide filmsASM INT·Filed 2005·Granted May 11, 2010·3 cites·38 claims
- 4771US9878516B2Metamaterial thin filmsGLEMBOCKI OREST J·Filed 2013·Granted Jan 30, 2018·2 cites·1 claims
- 4869US8685165B2Metal oxide filmsRAHTU ANTTI·Filed 2007·Granted Apr 1, 2014·1 cites·22 claims
- 4968US10619244B2Synthesis and use of precursors for ALD of group VA element containing thin filmsASM IP HOLDING BV·Filed 2019·Granted Apr 14, 2020·0 cites·13 claims
- 5065US2025263839A1Methods and systems for depositing metalloid layerASM IP HOLDING BV·Filed 2025·Application pending·0 cites
Showing the top 50 of 58 patent records by PatentIndex Score.
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