Inventor · disambiguated record
Elizabeth Pavel
Also filed as: PAVEL ELIZABETH G
1 granted patent·4 pending applications·0 citations·filing 2002–2007
14Inventor score
Top patents by PatentIndex Score
5 records- 0153US2008023443A1Alternating asymmetrical plasma generation in a process chamberPATERSON ALEXANDER·Filed 2007·Application pending·0 cites
- 0251US7648916B2Method and apparatus for performing hydrogen optical emission endpoint detection for photoresist strip and residue removalAPPLIED MATERIALS INC·Filed 2006·Granted Jan 19, 2010·0 cites·21 claims
- 0349US2005241762A1Alternating asymmetrical plasma generation in a process chamberAPPLIED MATERIALS INC·Filed 2005·Application pending·0 cites
- 0437US2004195208A1Method and apparatus for performing hydrogen optical emission endpoint detection for photoresist strip and residue removalFiled 2004·Application pending·0 cites
- 0535US2007051471A1Methods and apparatus for strippingAPPLIED MATERIALS INC·Filed 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →