Inventor · disambiguated record
Kurt L. Haller
Also filed as: HALLER KURT · HALLER KURT L · HALLER KURT LINDSAY
17 granted patents·413 citations·filing 1989–2020
94Inventor score
Top patents by PatentIndex Score
17 records- 0194US5367139AMethods and apparatus for contamination control in plasma processingIBM·Filed 1989·Granted Nov 22, 1994·60 cites·32 claims
- 0291US10551320B2Activation of wafer particle defects for spectroscopic composition analysisKLA TENCOR CORP·Filed 2017·Granted Feb 4, 2020·5 cites·19 claims
- 0387US7728965B2Systems and methods for inspecting an edge of a specimenKLA TENCOR TECH CORP·Filed 2005·Granted Jun 1, 2010·23 cites·20 claims
- 0487US5298720AMethod and apparatus for contamination control in processing apparatus containing voltage driven electrodeIBM·Filed 1990·Granted Mar 29, 1994·53 cites·30 claims
- 0585US7436505B2Computer-implemented methods and systems for determining a configuration for a light scattering inspection systemKLA TENCOR TECH CORP·Filed 2006·Granted Oct 14, 2008·12 cites·22 claims
- 0682US7968354B1Methods for correlating backside and frontside defects detected on a specimen and classification of backside defectsKLA TENCOR TECH CORP·Filed 2003·Granted Jun 28, 2011·40 cites·19 claims
- 0781US7697129B2Systems and methods for inspecting a wafer with increased sensitivityKLA TENCOR TECH CORP·Filed 2006·Granted Apr 13, 2010·6 cites·20 claims
- 0881US7372559B2Systems and methods for inspecting a wafer with increased sensitivityKLA TENCOR TECH CORP·Filed 2005·Granted May 13, 2008·6 cites·26 claims
- 0981US5387777AMethods and apparatus for contamination control in plasma processingIBM·Filed 1992·Granted Feb 7, 1995·42 cites·26 claims
- 1080US9970873B1System and method for luminescent tag based wafer inspectionKLA TENCOR CORP·Filed 2015·Granted May 15, 2018·2 cites·31 claims
- 1177US5255089APortable particle detector assemblyIBM·Filed 1992·Granted Oct 19, 1993·54 cites·17 claims
- 1274US8830464B2Film thickness, refractive index, and extinction coefficient determination for film curve creation and defect sizing in real timeKLA TENCOR CORP·Filed 2012·Granted Sep 9, 2014·2 cites·18 claims
- 1367US6191338B1Adhesive bandage, matrix, and methods of removalFiled 1998·Granted Feb 20, 2001·108 cites·20 claims
- 1462US9194812B2Illumination energy management in surface inspectionKLA TENCOR CORP·Filed 2014·Granted Nov 24, 2015·0 cites·26 claims
- 1556US8786850B2Illumination energy management in surface inspectionKLA TENCOR CORP·Filed 2012·Granted Jul 22, 2014·0 cites·28 claims
- 1652US11703460B2Methods and systems for optical surface defect material characterizationKLA CORP·Filed 2020·Granted Jul 18, 2023·0 cites·20 claims
- 1747US9052190B2Bright-field differential interference contrast system with scanning beams of round and elliptical cross-sectionsKLA TENCOR CORP·Filed 2013·Granted Jun 9, 2015·0 cites·26 claims
Join the waitlist — get patent alerts
Get an alert when Kurt L. Haller files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →