Inventor · disambiguated record
Shahin Zangooie
Also filed as: ZANGOOIE SHAHIN
13 granted patents·3 pending applications·238 citations·filing 2005–2016
88Inventor score
Top patents by PatentIndex Score
16 records- 0198US7478019B2Multiple tool and structure analysisKLA TENCOR CORP·Filed 2005·Granted Jan 13, 2009·225 cites·30 claims
- 0263US7808657B2Wafer and stage alignment using photonic devicesIBM·Filed 2007·Granted Oct 5, 2010·4 cites·16 claims
- 0363US7542136B2Flipping stage arrangement for reduced wafer contamination cross section and improved measurement accuracy and throughputIBM·Filed 2007·Granted Jun 2, 2009·1 cites·3 claims
- 0462US7742160B2Determining angle of incidence with respect to workpieceIBM·Filed 2008·Granted Jun 22, 2010·4 cites·20 claims
- 0559US8157978B2Etching system and method for forming multiple porous semiconductor regions with different optical and structural properties on a single semiconductor waferSENDELBACH MATTHEW J·Filed 2009·Granted Apr 17, 2012·2 cites·11 claims
- 0656US8680871B2Alignment correction system and method of useIBM·Filed 2013·Granted Mar 25, 2014·0 cites·8 claims
- 0756US8411270B2Monitoring stage alignment and related stage and calibration targetZANGOOIE SHAHIN·Filed 2008·Granted Apr 2, 2013·1 cites·19 claims
- 0855US8736275B2Alignment correction system and method of useIBM·Filed 2013·Granted May 27, 2014·0 cites·8 claims
- 0954US7592817B2Alignment correction system and method of useIBM·Filed 2007·Granted Sep 22, 2009·0 cites·2 claims
- 1053US7477365B2Optical spot geometric parameter determination using calibration targetsIBM·Filed 2007·Granted Jan 13, 2009·0 cites·7 claims
- 1151US7791723B2Optical measurement using fixed polarizerIBM·Filed 2008·Granted Sep 7, 2010·0 cites·18 claims
- 1250US2009027660A1Optical spot geometric parameter determination using calibration targetsZANGOOIE SHAHIN·Filed 2008·Application pending·0 cites
- 1346US8080849B2Characterizing films using optical filter pseudo substrateZANGOOIE SHAHIN·Filed 2008·Granted Dec 20, 2011·1 cites·8 claims
- 1444US2009182529A1Determining signal quality of optical metrology toolIBM·Filed 2008·Application pending·0 cites
- 1540US7646491B2Determining azimuth angle of incident beam to waferIBM·Filed 2007·Granted Jan 12, 2010·0 cites·12 claims
- 1630US2017219337A1Condensation-assisted metrologyHGST Netherlands BV·Filed 2016·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →