Inventor · disambiguated record
Mark J. Wihl
Also filed as: WIHL MARK · WIHL MARK J · WIHL MARK JOSEPH
18 granted patents·2,560 citations·filing 1983–2016
97Inventor score
Top patents by PatentIndex Score
18 records- 0199US5572598AAutomated photomask inspection apparatusKLA INSTR CORP·Filed 1994·Granted Nov 5, 1996·294 cites·49 claims
- 0298US5563702AAutomated photomask inspection apparatus and methodKLA INSTR CORP·Filed 1994·Granted Oct 8, 1996·386 cites·41 claims
- 0397US6363166B1Automated photomask inspection apparatusKLA TENCOR CORP·Filed 2000·Granted Mar 26, 2002·94 cites·32 claims
- 0497US6052478AAutomated photomask inspection apparatusKLA TENCOR CORP·Filed 1996·Granted Apr 18, 2000·166 cites·46 claims
- 0597US4532650APhotomask inspection apparatus and method using corner comparator defect detection algorithmKLA INSTR CORP·Filed 1983·Granted Jul 30, 1985·254 cites·25 claims
- 0696US7873204B2Method for detecting lithographically significant defects on reticlesKLA TENCOR CORP·Filed 2007·Granted Jan 18, 2011·56 cites·20 claims
- 0796US7738093B2Methods for detecting and classifying defects on a reticleKLA TENCOR CORP·Filed 2008·Granted Jun 15, 2010·42 cites·21 claims
- 0896US5737072AAutomated photomask inspection apparatus and methodKLA INSTR CORP·Filed 1996·Granted Apr 7, 1998·221 cites·41 claims
- 0995US4633504AAutomatic photomask inspection system having image enhancement meansKLA INSTR CORP·Filed 1984·Granted Dec 30, 1986·154 cites·7 claims
- 1095US4579455APhotomask inspection apparatus and method with improved defect detectionKLA INSTR CORP·Filed 1983·Granted Apr 1, 1986·280 cites·17 claims
- 1194US4926489AReticle inspection systemKLA INSTR CORP·Filed 1987·Granted May 15, 1990·311 cites·42 claims
- 1293US4555798AAutomatic system and method for inspecting hole qualityKLA INSTR CORP·Filed 1983·Granted Nov 26, 1985·180 cites·28 claims
- 1388US9892503B2Monitoring changes in photomask defectivityKLA TENCOR CORP·Filed 2016·Granted Feb 13, 2018·4 cites·28 claims
- 1487US6674522B2Efficient phase defect detection system and methodKLA TENCOR TECH CORP·Filed 2001·Granted Jan 6, 2004·31 cites·88 claims
- 1583US5085517AAutomatic high speed optical inspection systemCHADWICK CURT H·Filed 1989·Granted Feb 4, 1992·65 cites·56 claims
- 1678US9518935B2Monitoring changes in photomask defectivityKLA TENCOR CORP·Filed 2014·Granted Dec 13, 2016·3 cites·28 claims
- 1774US6584218B2Automated photomask inspection apparatusKLA TENCOR CORP·Filed 2001·Granted Jun 24, 2003·8 cites·1 claims
- 1869US7027635B1Multiple design database layer inspectionKLA TENCOR TECH CORP·Filed 2002·Granted Apr 11, 2006·11 cites·39 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →