Inventor · disambiguated record
Dirk Schaffer
Also filed as: SCHAFFER DIRK
19 granted patents·2 pending applications·31 citations·filing 2004–2023
91Inventor score
Files withZEISS CARL SMT GMBH13SCHAFFER DIRK2ZEISS CARL SMT AG2CHUNG HIN YIU ANTHONY1LIPPERT JOHANNES1
Top patents by PatentIndex Score
21 records- 0186US10007186B2Optical arrangement of a microlithographic projection exposure apparatusZEISS CARL SMT GMBH·Filed 2017·Granted Jun 26, 2018·3 cites·20 claims
- 0281US9134501B2Optical element unit and method of supporting an optical elementSCHAFFER DIRK·Filed 2007·Granted Sep 15, 2015·7 cites·42 claims
- 0378US10095126B2Moveably mounted component of projection exposure system, as well as device and method for movement limitation for sameZEISS CARL SMT GMBH·Filed 2017·Granted Oct 9, 2018·2 cites·21 claims
- 0478US8848167B2Optical element for UV or EUV lithography with coatings having optimized stress and thicknessLIPPERT JOHANNES·Filed 2011·Granted Sep 30, 2014·3 cites·20 claims
- 0574US7471469B2Device for the low-deformation replaceable mounting of an optical elementZEISS CARL SMT AG·Filed 2005·Granted Dec 30, 2008·5 cites·45 claims
- 0670US10215948B2Optical element module with minimized parasitic loadsZEISS CARL SMT GMBH·Filed 2012·Granted Feb 26, 2019·1 cites·25 claims
- 0768US8351139B2Optical element module with minimized parasitic loadsZEISS CARL SMT GMBH·Filed 2010·Granted Jan 8, 2013·1 cites·20 claims
- 0867US9250417B2Optical arrangement in a microlithographic projection exposure apparatusSCHAFFER DIRK·Filed 2012·Granted Feb 2, 2016·2 cites·23 claims
- 0962US8582081B2Device for the low-deformation replaceable mounting of an optical elementSORG FRANZ·Filed 2008·Granted Nov 12, 2013·2 cites·12 claims
- 1061US12393119B2Optical system and lithography apparatusZEISS CARL SMT GMBH·Filed 2023·Granted Aug 19, 2025·0 cites·20 claims
- 1158US10203607B2Optical element unit for exposure processesZEISS CARL SMT GMBH·Filed 2014·Granted Feb 12, 2019·0 cites·29 claims
- 1256US9046795B2Optical element unit for exposure processes having sealing elementSCHWERTNER TILMAN·Filed 2008·Granted Jun 2, 2015·1 cites·52 claims
- 1356US7085080B2Low-deformation support device of an optical elementZEISS CARL SMT AG·Filed 2004·Granted Aug 1, 2006·4 cites·30 claims
- 1455US2014063628A1Device for the low-deformation replaceable mounting of an optical elementZEISS CARL SMT GMBH·Filed 2013·Application pending·0 cites
- 1554US11029606B2Optical element for the beam guidance of imaging light in projection lithographyZEISS CARL SMT GMBH·Filed 2020·Granted Jun 8, 2021·0 cites·22 claims
- 1652US9459538B2Lithography apparatus and method for producing a mirror arrangementZEISS CARL SMT GMBH·Filed 2014·Granted Oct 4, 2016·0 cites·26 claims
- 1749US2016109679A1Optical Element Unit And Method Of Supporting An Optical ElementZEISS CARL SMT GMBH·Filed 2015·Application pending·0 cites
- 1846US10520838B2Mounting arrangement for an optical imaging arrangementZEISS CARL SMT GMBH·Filed 2018·Granted Dec 31, 2019·0 cites·20 claims
- 1942US9996015B2Mirror module, in particular for a microlithographic projection exposure appararatusZEISS CARL SMT GMBH·Filed 2017·Granted Jun 12, 2018·0 cites·20 claims
- 2039US9869937B2Mirror arrangement for a lithography apparatus and method for producing the sameZEISS CARL SMT GMBH·Filed 2015·Granted Jan 16, 2018·0 cites·33 claims
- 2136US8927090B2Method for bonding bodies and composite bodyCHUNG HIN YIU ANTHONY·Filed 2011·Granted Jan 6, 2015·0 cites·11 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →